Patents by Inventor David Hodul

David Hodul has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for microwave plasma substrate heating
    Patent number: 6030666
    Abstract: A method of microwave heating of a substrate in a plasma processing chamber wherein a heatup gas is supplied into the processing chamber, the heatup process gas is energized with microwave power to heat an exposed surface of the substrate, a reactant gas is supplied into the processing chamber and the reactant gas is energized into a plasma gas state to process the substrate.
    Type: Grant
    Filed: March 31, 1997
    Date of Patent: February 29, 2000
    Assignee: Lam Research Corporation
    Inventors: James Lam, David Hodul