Patents by Inventor David J. Fontaine

David J. Fontaine has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Slurry recirculation in chemical mechanical polishing
    Patent number: 6458020
    Abstract: A recirculation mechanism is used to force slurry toward the center of a platen used for chemical-mechanical polishing. The recirulator captures the slurry that would otherwise be flung from a rotating platen because of centrifugal force. The captured slurry is forced upwardly away from the surface of the platen and toward the center of the platen to recycle the slurry.
    Type: Grant
    Filed: November 16, 2001
    Date of Patent: October 1, 2002
    Assignee: International Business Machines Corporation
    Inventors: Jeffrey A. Brigante, Thomas L. Conrad, David J. Fontaine, Rock Nadeau, Paul H. Smith, Jr., Theodore G. van Kessel