Patents by Inventor David J. Rackoski

David J. Rackoski has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ventilation fixture and method of using same
    Patent number: 6171407
    Abstract: An apparatus and method are provided for removing gases produced during off-service cleaning of a processing chamber which operates under vacuum in a wafer fabrication tool. The apparatus includes a ventilation fixture providing a manifold having an internal cavity in fluid communication with a source of vacuum and at least one intake aperture, and a quick disconnect fitting connected to the source of vacuum and in fluid communication with the internal cavity. The manifold is portable and located adjacent to the processing chamber during cleaning.
    Type: Grant
    Filed: October 12, 1999
    Date of Patent: January 9, 2001
    Assignee: Motorola, Inc.
    Inventors: David J. Rackoski, Anthony M. Jones