Patents by Inventor David J. Twiss

David J. Twiss has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Directional gas injection for an ion source cathode assembly
    Patent number: 8263944
    Abstract: In an ion implanter, an inert gas is directed at a cathode assembly near an ion source chamber via a supply tube. The inert gas is provided with a localized directional flow toward the cathode assembly to reduce unwanted concentrations of cleaning or dopant gases introduced into the ion source chamber, thereby reducing the effects of unwanted filament growth in the cathode assembly and extending the manufacturing life of the ion source.
    Type: Grant
    Filed: December 22, 2008
    Date of Patent: September 11, 2012
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: John Bon-Woong Koo, David J. Twiss, Chris Campbell, Frank Sinclair, Alexander S. Perel, Craig R. Chaney, Wilhelm P. Platow, Eric R. Cobb
  • DIRECTIONAL GAS INJECTION FOR AN ION SOURCE CATHODE ASSEMBLY
    Publication number: 20100155619
    Abstract: In an ion implanter, an inert gas is directed at a cathode assembly near an ion source chamber via a supply tube. The inert gas is provided with a localized directional flow toward the cathode assembly to reduce unwanted concentrations of cleaning or dopant gases introduced into the ion source chamber, thereby reducing the effects of unwanted filament growth in the cathode assembly and extending the manufacturing life of the ion source.
    Type: Application
    Filed: December 22, 2008
    Publication date: June 24, 2010
    Applicant: Varian Semiconductor Equipment Associates Inc.
    Inventors: John Bon-Woong Koo, David J. Twiss, Chris Campbell, Frank Sinclair, Alexander S. Perel, Craig R. Chaney, Wilhelm P. Platow, Eric R. Cobb