Abstract: A method of calibrating an AFM scanner head of an AFM machine to determine the arc functions of the scanner head are provided. A method of measuring the actual orientation of an AFM tip in conjunction with the arc functions provides a way to know and control the actual AFM tip orientation for performing better AFM scans, obtaining more accurate depth measurements into a deep feature, and obtaining better portrayals of specific portions of a deep feature in AFM images. AFM images focusing on portraying specific portions of a deep feature structure may be combined to form a composite image of a representative deep feature for a sample.

Abstract: A method of calibrating an AFM scanner head of an AFM machine to determine the arc functions of the scanner head are provided. A method of measuring the actual orientation of an AFM tip in conjunction with the arc functions provides a way to know and control the actual AFM tip orientation for performing better AFM scans, obtaining more accurate depth measurements into a deep feature, and obtaining better portrayals of specific portions of a deep feature in AFM images. AFM images focusing on portraying specific portions of a deep feature structure may be combined to form a composite image of a representative deep feature for a sample.

Abstract: A method of calibrating an AFM scanner head of an AFM machine to determine the arc functions of the scanner head are provided. A method of measuring the actual orientation of an AFM tip in conjunction with the arc functions provides a way to know and control the actual AFM tip orientation for performing better AFM scans, obtaining more accurate depth measurements into a deep feature, and obtaining better portrayals of specific portions of a deep feature in AFM images. AFM images focusing on portraying specific portions of a deep feature structure may be combined to form a composite image of a representative deep feature for a sample.

Abstract: A method of calibrating an AFM scanner head of an AFM machine to determine the arc functions of the scanner head are provided. A method of measuring the actual orientation of an AFM tip in conjunction with the arc functions provides a way to know and control the actual AFM tip orientation for performing better AFM scans, obtaining more accurate depth measurements into a deep feature, and obtaining better portrayals of specific portions of a deep feature in AFM images. AFM images focusing on portraying specific portions of a deep feature structure may be combined to form a composite image of a representative deep feature for a sample.

Abstract: A method of scanning a deep feature using an atomic force microscopy (AFM) tip, which includes: locating and mapping the deep feature with a surface survey scan; analyzing the scan data to identify an initial optimum location; moving the AFM tip to the initial optimum location; and repeating a first procedure until the AFM tip reaches a bottom of the deep feature, which includes: (a) lowering the AFM tip in a first direction by a first distance increment; (b) measuring atomic force interactions exerted on the AFM tip to determine whether the bottom of the deep feature has been reached; (c) moving the AFM tip in a geometric pattern and within a current plane; (d) measuring atomic force interactions exerted on the AFM tip at various locations in the geometric pattern to determine a new optimum location where the atomic force interactions are minimum; and (e) moving the AFM tip to the new optimum location, repeating (a-e) until bottom has been reached, (f) then measure the depth.

Abstract: A method of scanning a deep feature using an atomic force microscopy (AFM) tip, which includes: locating and mapping the deep feature with a surface survey scan; analyzing the scan data to identify an initial optimum location; moving the AFM tip to the initial optimum location; and repeating a first procedure until the AFM tip reaches a bottom of the deep feature, which includes: (a) lowering the AFM tip in a first direction by a first distance increment; (b) measuring atomic force interactions exerted on the AFM tip to determine whether the bottom of the deep feature has been reached; (c) moving the AFM tip in a geometric pattern and within a current plane; (d) measuring atomic force interactions exerted on the AFM tip at various locations in the geometric pattern to determine a new optimum location where the atomic force interactions are minimum; and (e) moving the AFM tip to the new optimum location, repeating (a-e) until bottom has been reached, (f) then measure the depth.