Abstract: This application generally relates to a chamber component for a thermal processing chamber comprising a base component having a coating disposed thereon, the coating having a base component having a coating disposed thereon, the coating includes a surface, a thickness, and a plurality of cracks extending from the surface of the coating through at least 40 percent of the thickness of the coating.

Abstract: An embodiment of a method includes placing a substrate on a substrate support assembly that is at least partially positioned in a processing chamber. The substrate support assembly includes a body having an outer surface and an outer coating layer disposed at least partially over the outer surface, the outer coating layer comprising yttrium fluoride (YF3). In addition, the method includes contacting a surface of the substrate with a process gas in the processing chamber at a process temperature that is about 40° C. or less to remove oxides from the surface.

Abstract: Exemplary methods of coating a metal-containing component are described. The methods are developed to increase corrosion resistance and improve coating adhesion to a metal substrate. The methods include forming a bonding layer on a metal substrate, where the bonding layer includes an oxide of a metal in the metal substrate. The coating methods further include depositing a stress buffer layer on the bonding layer, where the stress buffer layer is characterized by a stress buffer layer coefficient of thermal expansion (CTE) that is less than a metal substrate CTE and a bonding layer CTE. The coating methods also include depositing an environmental barrier layer on the stress buffer layer, where a ratio of the metal substrate CTE to an environmental barrier layer CTE is greater than or about 20:1, and where the environmental barrier layer includes silicon oxide. The metal-containing components may be used in fabrication equipment for electronic devices.

Abstract: Described herein are lithium-metal negative electrodes, lithium-metal liquid-electrolyte electrochemical cells comprising such electrodes, and methods of fabricating such electrodes. In some examples, a lithium-metal negative electrode comprises a base layer comprising aluminum and/or titanium. The lithium-metal negative electrode also comprises a protection layer disposed on and supported by the base layer and comprising copper, silicon, zinc, magnesium, nickel, molybdenum, tungsten, tantalum, and/or silver. Furthermore, the lithium-metal negative electrode comprises a lithium-metal negative active material layer attached to and supported by the protection layer such that the protection layer is positioned between the negative-electrode base layer and the lithium-metal negative active material layer.

Abstract: Exemplary methods of coating a metal-containing component are described. The methods are developed to increase corrosion resistance and improve coating adhesion to a metal substrate. The methods include forming a bonding layer on a metal substrate, where the bonding layer includes an oxide of a metal in the metal substrate. The coating methods further include depositing a stress buffer layer on the bonding layer, where the stress buffer layer is characterized by a stress buffer layer coefficient of thermal expansion (CTE) that is less than a metal substrate CTE and a bonding layer CTE. The coating methods also include depositing an environmental barrier layer on the stress buffer layer, where a ratio of the metal substrate CTE to an environmental barrier layer CTE is greater than or about 20:1, and where the environmental barrier layer includes silicon oxide. The metal-containing components may be used in fabrication equipment for electronic devices.

Abstract: Described herein is a chamber component including a metal oxy-fluoride coating including YF3, ZrF4 or combination thereof and a metal oxide consisting of Y2O3 and ZrO2. The metal oxy-fluoride coating includes 5 mol % to 90 mol % of YF3 or ZrF4 and 10 mol % to 95 mol % of the metal oxide. The metal oxy-fluoride coating is amorphous and has: 35 - 50 ? at . % ? of ? yttrium ? ( Y ) ; 0.3 - 10 ? at . % ? of ? zirconium ? ( Zr ) ; 5 - 57 ? at . % ? of ? oxygen ? ( O ) ; and 3 - 65 ? at . % ? of ? fluorine ? ( F ) .

Abstract: Embodiments of the present disclosure generally relate to a substrate support having a surface coating which reduces defect formation and back side metal contamination during substrate processing. A support body includes a body having an outer surface and a surface coating formed from a non-metal or a reduced-metal material disposed over at least a top surface of the outer surface of the body. In an embodiment, the surface coating includes a two-part coating having an optional first coating layer formed over an entire outer surface of the support body.

Abstract: A method of manufacturing a part with a CMAS-resistant thermal barrier coating (TBC) includes providing a part body having a surface and providing a source of coating material. The coating material includes a thermal protection material and a CMAS-reactive material. The method also includes delivering the coating material from the source toward the surface of the part body to form the CMAS-resistant TBC on the surface. The CMAS-resistant TBC includes both the thermal protection material and the CMAS-reactive material. The CMAS-reactive material is included as a substantially uniform distribution within the thermal protection material.

Abstract: This application generally relates to a chamber component for a thermal processing chamber comprising a base component having a coating disposed thereon, the coating having a base component having a coating disposed thereon, the coating includes a surface, a thickness, and a plurality of cracks extending from the surface of the coating through at least 40 percent of the thickness of the coating.

Abstract: Exemplary methods of coating a metal-containing component are described. The methods are developed to increase corrosion resistance and improve coating adhesion to a metal substrate. The methods include forming a bonding layer on a metal substrate, where the bonding layer includes an oxide of a metal in the metal substrate. The coating methods further include depositing a stress buffer layer on the bonding layer, where the stress buffer layer is characterized by a stress buffer layer coefficient of thermal expansion (CTE) that is less than a metal substrate CTE and a bonding layer CTE. The coating methods also include depositing an environmental barrier layer on the stress buffer layer, where a ratio of the metal substrate CTE to an environmental barrier layer CTE is greater than or about 20:1, and where the environmental barrier layer includes silicon oxide. The metal-containing components may be used in fabrication equipment for electronic devices.

Abstract: Embodiments of the present disclosure generally relate to a substrate support having a two-part surface coating which reduces defect formation and back side metal contamination during substrate processing. A support body includes a body having an upper surface and a two-part coating disposed over the upper surface of the body. The two-part coating includes a first coating layer extending a first radial distance from a center of the body. The first coating layer includes at least one of a metal-containing material or alloy. The two-part coating includes a second coating layer disposed over the first coating layer. The second coating layer extends a second radial distance from the center of the body. The first radial distance is greater than the second radial distance. The second coating layer is non-metal.

Abstract: A method for forming a porous barrier coating on a substrate without substantial chemical segregation includes the steps of providing or obtaining a barrier coating material in powdered form and spraying the barrier coating material onto the substrate using air plasma spraying. The air plasma spraying is performed using an average homologous surface temperature of the depositing particles in a range of about 1.25 to about 1.5 and a particle velocity in a range of about 300 m/s to about 500 m/s. The depositing particles are fully molten.

Abstract: A method of manufacturing a part with a CMAS-resistant thermal barrier coating (TBC) includes providing a part body having a surface and providing a source of coating material. The coating material includes a thermal protection material and a CMAS-reactive material. The method also includes delivering the coating material from the source toward the surface of the part body to form the CMAS-resistant TBC on the surface. The CMAS-resistant TBC includes both the thermal protection material and the CMAS-reactive material. The CMAS-reactive material is included as a substantially uniform distribution within the thermal protection material.

Abstract: A method for forming a porous barrier coating on a substrate without substantial chemical segregation includes the steps of providing or obtaining a barrier coating material in powdered form and spraying the barrier coating material onto the substrate using air plasma spraying. The air plasma spraying is performed using an average homologous surface temperature of the depositing particles in a range of about 1.25 to about 1.5 and a particle velocity in a range of about 300 m/s to about 500 m/s. The depositing particles are fully molten.

Abstract: The subject invention provides a flight simulator, having a folded state and an unfolded state, having a chassis, an inner display and support that may be stowed or deployed, and an outer display and support that may be stowed or deployed.

Abstract: The subject invention provides a flight simulator, having a folded state and an unfolded state, having a chassis, an inner display and support that may be stowed or deployed, and an outer display and support that may be stowed or deployed.

Abstract: A variable force solenoid valve assembly generally includes a coil, magnetic pole, armature, and one or more variable size air gaps that are disposed within the solenoid. The solenoid may be calibrated by first energizing the solenoid coils and determining a corresponding desired hydraulic pressure, measuring the actual hydraulic pressure, and adjusting the magnetic flux until the desired output pressure is achieved.