Patents by Inventor David Kamp

David Kamp has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Showerhead tilt mechanism
    Patent number: 10760160
    Abstract: A showerhead tilt adjustment mechanism is provided which supports a showerhead module in a top plate of a semiconductor substrate processing apparatus, the showerhead tilt adjustment mechanism including a differential screw which provides coarse and fine adjustments to adjust gap/tilt/planarization of a faceplate of the showerhead module with respect to an upper surface of a substrate pedestal module adjacent the faceplate in the semiconductor substrate processing apparatus.
    Type: Grant
    Filed: January 25, 2019
    Date of Patent: September 1, 2020
    Assignee: Lam Research Corporation
    Inventors: Bin Luo, Timothy Scott Thomas, Damien Slevin, David Kamp
  • SHOWERHEAD TILT MECHANISM
    Publication number: 20190153601
    Abstract: A showerhead tilt adjustment mechanism is provided which supports a showerhead module in a top plate of a semiconductor substrate processing apparatus, the showerhead tilt adjustment mechanism including a differential screw which provides coarse and fine adjustments to adjust gap/tilt/planarization of a faceplate of the showerhead module with respect to an upper surface of a substrate pedestal module adjacent the faceplate in the semiconductor substrate processing apparatus.
    Type: Application
    Filed: January 25, 2019
    Publication date: May 23, 2019
    Applicant: LAM RESEARCH CORPORATION
    Inventors: Bin Luo, Timothy Scott Thomas, Damien Slevin, David Kamp
  • Article with controlled wettability
    Patent number: 9624101
    Abstract: An article is provided, the article including a substrate having a surface with a first wettability characteristic. A nano-structure array is formed on the surface of the substrate to provide a nano-structured surface having a second wettability characteristic. A thin-layer surface coating is formed on the nano-structured surface, the thin-layer surface coating being configured to tune the nano-structured surface to a target wettability characteristic.
    Type: Grant
    Filed: October 21, 2010
    Date of Patent: April 18, 2017
    Assignee: Hewlett-Packard Development Company, L.P.
    Inventors: Peter Mardilovich, Anthony M. Fuller, Qingqiao Wei, Rio Rivas, David Kamp
  • ARTICLE WITH CONTROLLED WETTABILITY
    Publication number: 20130192993
    Abstract: An article is provided, the article including a substrate having a surface with a first wettability characteristic. A nano-structure array is formed on the surface of the substrate to provide a nano-structured surface having a second wettability characteristic. A thin-layer surface coating is formed on the nano-structured surface, the thin-layer surface coating being configured to tune the nano-structured surface to a target wettability characteristic.
    Type: Application
    Filed: October 21, 2010
    Publication date: August 1, 2013
    Inventors: Peter Mardilovich, Anthony M. Fuller, Qingqiao Wei, Rio Rivas, David Kamp