Abstract: A target for sputtering comprises SiZrxOy wherein x is higher than 0.02 but not higher than 5, and y is higher than 0.03 but not higher than 2*(1+x), wherein the target has an XRD pattern with silicon 2-theta peak at 28.29°+/?0.3°, or a tetragonal phase ZrO2 2-theta peak at 30.05°+/?0.3°. The target has a low resistivity, below 1000 ohm·cm, preferably below 100 ohm·cm, more preferably below 10 ohm·cm, even lower than 1 ohm·cm.

Abstract: A target for sputtering comprises SiZrxOy wherein x is higher than 0.02 but not higher than 5, and y is higher than 0.03 but not higher than 2*(1+x), wherein the target has an XRD pattern with silicon 2-theta peak at 28.29°+/?0.3°, or a tetragonal phase ZrO2 2-theta peak at 30.05°+/?0.3°. The target has a low resistivity, below 1000 ohm·cm, preferably below 100 ohm·cm, more preferably below 10 ohm·cm, even lower than 1 ohm·cm.

Abstract: In a first aspect, the present invention relates to a planar sputtering target comprising a target material layer built up by a layering of splats, wherein the target material layer has a layer width and has a microstructure which varies across the layer width. In a second aspect, the present invention relates to a method for manufacturing such a planar sputtering target.

Abstract: Method and apparatus for conducting a search to match a string of symbols of a sequence of symbols with a stored string of symbols in a dictionary to provide a matched string of symbols. In the method, after a matched string of symbols of the sequence of symbols has been found, beginning from a first position in the dictionary in which the first symbol of the matched string is stored, it is determined if a longer matched string of symbols can be found by first comparing a chosen symbol that follows the matched string of symbols in the sequence of symbols with a symbol stored in a corresponding position in the dictionary, beginning with another position in the dictionary in which the first symbol is stored, to determine whether the symbol stored in the corresponding position matches the chosen symbol. If the comparison does not result in a match, it is immediately known that a longer string of matched symbols has not been found and it maybe possible to omit additional comparing steps.

Abstract: Method and apparatus for conducting a search to match a string of symbols of a sequence of symbols with a stored string of symbols in a dictionary to provide a matched string of symbols. In the method, after a matched string of symbols of the sequence of symbols has been found, beginning from a first position in the dictionary in which the first symbol of the matched string is stored, it is determined if a longer matched string of symbols can be found by first comparing a chosen symbol that follows the matched string of symbols in the sequence of symbols with a symbol stored in a corresponding position in the dictionary, beginning with another position in the dictionary in which the first symbol is stored, to determine whether the symbol stored in the corresponding position matches the chosen symbol. If the comparison does not result in a match, it is immediately known that a longer string of matched symbols has not been found and it maybe possible to omit additional comparing steps.