Abstract: Devices, systems, and methods of generating and providing a target topographic map for finishing a photomask blank are disclosed. A method includes receiving topographic data corresponding to an uncompleted photomask blank, receiving functional specifications for flatness of an acceptable photomask blank, and generating the target topographic map for first and/or second major surfaces of the blank, which provides instructions for removing material from the first and/or second major surfaces such that the first and second major surfaces achieve a flatness that passes each functional specification. The amount of material removed reflects a reduction in material necessary to pass the functional specifications.

Abstract: Devices, systems, and methods of generating and providing a target topographic map for finishing a photomask blank are disclosed. A method includes receiving topographic data corresponding to an uncompleted photomask blank, receiving functional specifications for flatness of an acceptable photomask blank, and generating the target topographic map for first and/or second major surfaces of the blank, which provides instructions for removing material from the first and/or second major surfaces such that the first and second major surfaces achieve a flatness that passes each functional specification. The amount of material removed reflects a reduction in material necessary to pass the functional specifications.

Abstract: A method of measuring aberrations in a null-lens including assembly and alignment aberrations. The null-lens may be used for measuring aberrations in an aspheric optic with the null-lens. Light propagates from the aspheric optic location through the null-lens, while sweeping a detector through the null-lens focal plane. Image data being is collected at locations about said focal plane. Light is simulated propagating to the collection locations for each collected image. Null-lens aberrations may extracted, e.g., applying image-based wavefront-sensing to collected images and simulation results. The null-lens aberrations improve accuracy in measuring aspheric optic aberrations.

Abstract: A rebinning device includes a rebinning engine that transforms signal data from a first format to a second format with vectorized binning. Moreover, a data storage operably coupled to the rebinning engine stores the signal data in the second format. The rebinning device may optionally includes a capturing engine that captures the signal data in the first format and a rendering engine that renders the signal data in the second format.

Abstract: A rebinning device includes a rebinning engine that transforms signal data from a first format to a second format with vectorized binning. Moreover, a data storage operably coupled to the rebinning engine stores the signal data in the second format. The rebinning device may optionally includes a capturing engine that captures the signal data in the first format and a rendering engine that renders the signal data in the second format.

Abstract: Padding or adding data to a data signal can increase the speed with which a signal processor can process the data. Methods are provided herein that can accurately predict the optimal pad size of a two dimensional array of data, which can be used to increase the processing speed of a signal processor by optimizing run-time for a two-dimensional (2-D) fast Fourier transform (FFT) operation.

Abstract: Disclosed herein are systems, methods, and non-transitory computer-readable storage media for simulating propagation of an electromagnetic field, performing phase retrieval, or sampling a band-limited function. A system practicing the method generates transformed data using a discrete Fourier transform which samples a band-limited function f(x) without interpolating or modifying received data associated with the function f(x), wherein an interval between repeated copies in a periodic extension of the function f(x) obtained from the discrete Fourier transform is associated with a sampling ratio Q, defined as a ratio of a sampling frequency to a band-limited frequency, and wherein Q is assigned a value between 1 and 2 such that substantially no aliasing occurs in the transformed data, and retrieves a phase in the received data based on the transformed data, wherein the phase is used as feedback to an optical system.

Abstract: Disclosed herein are systems, methods, and non-transitory computer-readable storage media for simulating propagation of an electromagnetic field, performing phase retrieval, or sampling a band-limited function. A system practicing the method generates transformed data using a discrete Fourier transform which samples a band-limited function f(x) without interpolating or modifying received data associated with the function f(x), wherein an interval between repeated copies in a periodic extension of the function f(x) obtained from the discrete Fourier transform is associated with a sampling ratio Q, defined as a ratio of a sampling frequency to a band-limited frequency, and wherein Q is assigned a value between 1 and 2 such that substantially no aliasing occurs in the transformed data, and retrieves a phase in the received data based on the transformed data, wherein the phase is used as feedback to an optical system.

Abstract: Padding or adding data to a data signal can increase the speed with which a signal processor can process the data. Methods are provided herein that can accurately predict the optimal pad size of a two dimensional array of data, which can be used to increase the processing speed of a signal processor by optimizing run-time for a two-dimensional (2-D) fast Fourier transform (FFT) operation.

Abstract: A variable sample mapping algorithm supplements an iterative transform algorithm stored on a computer readable medium. The variable sample mapping algorithm employs data-to-model mapping comprising: modeling a measured data point; modeling estimated additional data corresponding to the measured data point; and adjusting the estimated additional data to include the corresponding measured data point.

Abstract: Increased yield of optical elements from cubic crystal rods, such as made of calcium fluoride, is made possible by orienting the optical elements for supporting the propagation of light along one of the <1 1 2>, <1 2 1>, or < 2 1 1> alternative crystal axis, which extend perpendicular to a main <1 1 1> crystal axis. A cleave is taken through the crystal rod along a primary crystal plane {1 1 1} normal to the <1 1 1> main axis. One of the <1 1 2>, <1 2 1>, or < 2 1 1> alternative crystal axes is located by optical inspection and indicated on the crystal rod with an orientation label. Additional cuts are taken parallel to the {1 1 1} primary crystal plane to divide the crystal rod into disks each containing a portion of the orientation label.