Abstract: A reticle transport system having a magnetically levitated transportation stage is disclosed. Such a system may be suitable for use in vacuum environments, for example, ultra-clean vacuum environments. A magnetic levitated linear motor functions to propel the transportation stage in a linear direction along a defined axis of travel and to magnetically levitate the transportation stage.

Abstract: A reticle transport system having a magnetically levitated transportation stage is disclosed. Such a system may be suitable for use in vacuum environments, for example, ultra-clean vacuum environments.

Abstract: A flow control system that produces smooth flow for on-chip pneumatic micropumps has been developed. By establishing a flow control system that can achieve smooth flow, fluidic conditions of microphysiological systems can be controlled to accurately mimic biological conditions. Biological experiments can require flow profiles anywhere on the spectrum of smooth flow to highly pulsatile flow. A smooth flow profile can be modified with pumping delays to make the flow profile as pulsatile as desired.

Abstract: An electrostatic chuck includes electrodes to clamp a workpiece, electrodes to electrostatically levitate and position the workpiece, and sensors to detect position and orientation of the workpiece. Lateral motion of the workpiece relative to the electrostatic chuck can be damped prior to clamping.

Abstract: On-platform pumps provide greater flexibility and design freedom and are a key feature of organs-on-chip platforms. On-platform electromagnetic (EM) pumps have been developed for use with the organ-on-chip platforms. The EM pump uses electrical energy, which may be supplied by a battery, making the pump portable. The EM pump uses an EM actuator having a low energy consumption. The actuator's low energy consumption is achieved by a latching design which requires only a short pulse of energy to switch its state and where springs store some of the actuator kinetic energy, which is then recovered in the reverse stroke. This further reduces the energy consumption of the actuator. Also provided are injection-molded, single-use platforms with onboard diaphragm micro-pumps and various valve and pump geometries. The EM actuators easily integrate with these platforms, demonstrating pumping at a constant flowrate, no measurable temperature rise, and valve sealing against varying back-pressure.

Abstract: Described herein is a magnetically levitated linear transportation stage which utilizes a permanent magnet bias flux to generate a passive magnetic/suspension force/torque in a first set of directions orthogonal to a direction of transportation stage travel, a motor flux which forms a traveling wave along a direction of transportation stage travel and a suspension control force orthogonal to the direction of transportation stage travel. Such a magnetically levitated linear transportation stage is suitable for use in in-vacuum transportation tasks such as in conjunction with photo lithography systems (e.g. extreme ultra violet (EUV) machines).

Abstract: A highly portable advanced adult and pediatric compact ECLS system is based around an integrated pump-oxygenator. The system includes a central a blood inlet and flow path extending along a general longitudinal axis of the system; a pump housing defining a pump inlet in fluid communication with the central blood flow path; an impeller rotationally received within the area of the pump inlet, wherein the impeller is magnetically supported and magnetically driven; an array of hollow fiber membranes configured for gas transfer within the system for oxygenation of blood flowing across the hollow fiber membranes, wherein the membranes include a covalently-bonded heparin-based bioactive surface, and wherein the blood flow path extends from the impeller to a position to flow perpendicular over the array of hollow fiber membranes; and a blood outlet configured to receive blood flowing past the array of hollow fiber membranes.

Abstract: A motor system can include a bearingless stator having a plurality of magnetic windings including rotation windings and suspension windings; a dipole interior permanent magnet (IPM) rotor positioned within the stator, the rotor having a plurality of permanent magnets disposed within a cylindrical structure; one or more position sensors to measure radial and angular position of the rotor; and a controller configured to receive measurements from the one or more position sensors and to generate current commands for the stator to excite the rotation windings to generate torque and to excite the suspension windings to stabilize the rotor within the stator.

Abstract: A reticle transport system having a magnetically levitated transportation stage is disclosed. Such a system may be suitable for use in vacuum environments, for example, ultra-clean vacuum environments.

Abstract: A reticle transport system having a magnetically levitated transportation stage is disclosed. Such a system may be suitable for use in vacuum environments, for example, ultra-clean vacuum environments. A magnetic levitated linear motor functions to propel the transportation stage in a linear direction along a defined axis of travel and to magnetically levitate the transportation stage.

Abstract: High force and low noise linear fine-tooth motors are described herein. Such motors can include armatures having fine teeth separated by narrow slots such that a ratio of a pitch between teeth and a pitch between permanent magnet poles is less than that of a conventional iron-core linear motor. In one embodiment, such a linear motor can include a first component having an armature including a plurality of iron cores surrounded by coil windings, and a second component having a plurality of permanent magnets with alternating polarity. The plurality of iron cores can be spaced apart from one another by an iron core pitch distance and the plurality of permanent magnets can be spaced apart from one another by a permanent magnet pole pitch distance, and a ratio of the iron core pitch to the magnetic pole pitch can be less than 1.33.

Abstract: A motor system can include a bearingless stator having a plurality of magnetic windings including rotation windings and suspension windings; a dipole interior permanent magnet (IPM) rotor positioned within the stator, the rotor having a plurality of permanent magnets disposed within a cylindrical structure; one or more position sensors to measure radial and angular position of the rotor; and a controller configured to receive measurements from the one or more position sensors and to generate current commands for the stator to excite the rotation windings to generate torque and to excite the suspension windings to stabilize the rotor within the stator.

Abstract: A reticle transport system having a magnetically levitated transportation stage is disclosed. Such a system may be suitable for use in vacuum environments, for example, ultra-clean vacuum environments.

Abstract: Described herein is a magnetically levitated linear transportation stage which utilizes a permanent magnet bias flux to generate a passive magnetic/suspension force/torque in a first set of directions orthogonal to a direction of transportation stage travel, a motor flux which forms a traveling wave along a direction of transportation stage travel and a suspension control force orthogonal to the direction of transportation stage travel. Such a magnetically levitated linear transportation stage is suitable for use in in-vacuum transportation tasks such as in conjunction with photo lithography systems (e.g. extreme ultra violet (EUV) machines).

Abstract: Described are homopolar bearingless slice motors which include an array arrangement of permanent magnets on stator teeth, and a magnet-free rotor having a unique surface geometry. Also described are related components of such motors. The permanent magnet arrays provide homopolar bias flux to the rotor, and salient features on the rotor surface route the bias flux toward paths desirable for force and torque generation. In an illustrative embodiment, two magnet arrays are placed at the tips of stator teeth, so as to provide the bias flux via relatively short flux paths. By modulating current through windings based upon the rotor radial and angular position measurements, the stator can levitate and rotate the rotor.

Abstract: High force and low noise linear fine-tooth motors are described herein. Such motors can include armatures having fine teeth separated by narrow slots such that a ratio of a pitch between teeth and a pitch between permanent magnet poles is less than that of a conventional iron-core linear motor. In one embodiment, such a linear motor can include a first component having an armature including a plurality of iron cores surrounded by coil windings, and a second component having a plurality of permanent magnets with alternating polarity. The plurality of iron cores can be spaced apart from one another by an iron core pitch distance and the plurality of permanent magnets can be spaced apart from one another by a permanent magnet pole pitch distance, and a ratio of the iron core pitch to the magnetic pole pitch can be less than 1.33.

Abstract: On-platform pumps provide greater flexibility and design freedom and are a key feature of organs-on-chip platforms. On-platform electromagnetic (EM) pumps have been developed for use with the organ-on-chip platforms. The EM pump uses electrical energy, which may be supplied by a battery, making the pump portable. The EM pump uses an EM actuator having a low energy consumption. The actuator's low energy consumption is achieved by a latching design which requires only a short pulse of energy to switch its state and where springs store some of the actuator kinetic energy, which is then recovered in the reverse stroke. This further reduces the energy consumption of the actuator. Also provided are injection-molded, single-use platforms with onboard diaphragm micro-pumps and various valve and pump geometries. The EM actuators easily integrate with these platforms, demonstrating pumping at a constant flowrate, no measurable temperature rise, and valve sealing against varying back-pressure.

Abstract: Organ-on-chip platforms with reduced fluid volumes include circulating fluid volumes of below 1000 ?L, preferably about 500 ?L or less. The platforms are adjustable for culturing cells with varied oxygen demand at various seeding densities. The platforms include at least one lane, wherein each lane includes at least one cell culture well, at least one oxygenator for fluid oxygenation, and a pump system containing at least one pump per lane. The oxygenator may include a separate fluid path for oxygenating the fluid, which allows controlling and measuring the oxygen concentration in the fluid, shortening the diffusion length, and passively diffusing oxygen. Provided are also different configurations for the oxygenator, fluid circulation in the platforms, attachment means for securing scaffolds to culture wells, and pneumatic plates.

Abstract: Described are homopolar bearingless slice motors which include an array arrangement of permanent magnets on stator teeth, and a magnet-free rotor having a unique surface geometry. Also described are related components of such motors. The permanent magnet arrays provide homopolar bias flux to the rotor, and salient features on the rotor surface route the bias flux toward paths desirable for force and torque generation. In an illustrative embodiment, two magnet arrays are placed at the tips of stator teeth, so as to provide the bias flux via relatively short flux paths. By modulating current through windings based upon the rotor radial and angular position measurements, the stator can levitate and rotate the rotor.

Abstract: A device for controlling apical flow to a cell culture includes an apical insert that defines at least one inlet channel extending from an inlet port to an apical feed port and at least one outlet channel extending from an apical effluent port to an outlet port. The apical insert includes a projecting portion configured to extend into a cell culture insert to a depth that is less than a depth of the cell culture insert, and a contact surface configured to maintain a spatial relationship between the projecting portion and the cell culture insert.