Abstract: A reticle stage for a photolithography scanner is disclosed having a direct-drive ironless linear motor to actuate a short-stroke stage during a turnaround operation. The reticle stage may include a long stroke stage, an array of permanent magnets coupled to a beam, and at least one conductive coil mounted to the short-stroke stage without a ferromagnetic core. The beam may pass through the short-stroke stage and be coupled to one of the long-stroke stage or a balance mass, both of which may be disposed about the perimeter of the short-stroke stage. An electrical current applied to the coil may interact with the magnetic field from the permanent magnets to provide a force on the short-stroke stage.

Abstract: A photolithography system with an actuatable reticle stage is disclosed. Mechanical actuators coupled to a long-stroke reticle stage are driven to extend and mechanically contact a short-stroke stage during reticle stage turnaround. The actuators may be piezoelectric stack pushers or pneumatic bellows pushers. The pusher devices are controlled and driven to enable higher acceleration turnaround trajectories by applying forces via mechanical contact engaging during turnaround and disengaging before exposure begins during a scan.

Abstract: A reticle stage for a photolithography scanner having a pneumatic actuation system is disclosed. The pneumatic actuation system may provide a restoring force to a long-stroke stage during scan and turnaround operations. The reticle stage may have or define dual-chamber pneumatic pistons as energy storage devices to create turnaround forces for stage acceleration. As the long-stroke stage is driven by a linear motor a pressure differential is formed between the two pistons providing a net force opposing the direction of the long-stroke stage movement.

Abstract: Organ-on-chip platforms with reduced fluid volumes include circulating fluid volumes of below 1000 ?L, preferably about 500 ?L or less. The platforms are adjustable for culturing cells with varied oxygen demand at various seeding densities. The platforms include at least one lane, wherein each lane includes at least one cell culture well, at least one oxygenator for fluid oxygenation, and a pump system containing at least one pump per lane. The oxygenator may include a separate fluid path for oxygenating the fluid, which allows controlling and measuring the oxygen concentration in the fluid, shortening the diffusion length, and passively diffusing oxygen. Provided are also different configurations for the oxygenator, fluid circulation in the platforms, attachment means for securing scaffolds to culture wells, and pneumatic plates.

Abstract: A position sensor with six degrees of freedom (DoF) measurement capability may be used for position sensing of the rotor in a bearingless slice motor to enable active control. The sensor is designed to fit entirely under the rotor and operates by accessing the rotor bottom surface only, enabling packaging of the pump on the top of the rotor. The sensor has two parts; both operate using eddy currents. One of these parts measures the two radial DoF of the rotor. The other part measures the axial, angular rotation and tip/tilt DoF. The sensor utilizes a conductive target fixed to the underside of the rotor. The design and fabrication of the sensor along with the signal processing methods are described.

Abstract: A bearingless split tooth flux-reversal motor (FRM) for use with a pump, such as a centrifugal blood pump. In some embodiments, the motor has a magnet-free rotor and a magnetic configuration wherein the force generation is independent of the rotor angle, allowing for simple radial force generation using stator-fixed currents. The motor torque can be generated using commutated two-phase currents.

Abstract: A reticle transport system having a magnetically levitated transportation stage is disclosed. Such a system may be suitable for use in vacuum environments, for example, ultra-clean vacuum environments. A magnetic levitated linear motor functions to propel the transportation stage in a linear direction along a defined axis of travel and to magnetically levitate the transportation stage.

Abstract: A reticle transport system having a magnetically levitated transportation stage is disclosed. Such a system may be suitable for use in vacuum environments, for example, ultra-clean vacuum environments.

Abstract: A flow control system that produces smooth flow for on-chip pneumatic micropumps has been developed. By establishing a flow control system that can achieve smooth flow, fluidic conditions of microphysiological systems can be controlled to accurately mimic biological conditions. Biological experiments can require flow profiles anywhere on the spectrum of smooth flow to highly pulsatile flow. A smooth flow profile can be modified with pumping delays to make the flow profile as pulsatile as desired.

Abstract: An electrostatic chuck includes electrodes to clamp a workpiece, electrodes to electrostatically levitate and position the workpiece, and sensors to detect position and orientation of the workpiece. Lateral motion of the workpiece relative to the electrostatic chuck can be damped prior to clamping.

Abstract: On-platform pumps provide greater flexibility and design freedom and are a key feature of organs-on-chip platforms. On-platform electromagnetic (EM) pumps have been developed for use with the organ-on-chip platforms. The EM pump uses electrical energy, which may be supplied by a battery, making the pump portable. The EM pump uses an EM actuator having a low energy consumption. The actuator's low energy consumption is achieved by a latching design which requires only a short pulse of energy to switch its state and where springs store some of the actuator kinetic energy, which is then recovered in the reverse stroke. This further reduces the energy consumption of the actuator. Also provided are injection-molded, single-use platforms with onboard diaphragm micro-pumps and various valve and pump geometries. The EM actuators easily integrate with these platforms, demonstrating pumping at a constant flowrate, no measurable temperature rise, and valve sealing against varying back-pressure.

Abstract: Described herein is a magnetically levitated linear transportation stage which utilizes a permanent magnet bias flux to generate a passive magnetic/suspension force/torque in a first set of directions orthogonal to a direction of transportation stage travel, a motor flux which forms a traveling wave along a direction of transportation stage travel and a suspension control force orthogonal to the direction of transportation stage travel. Such a magnetically levitated linear transportation stage is suitable for use in in-vacuum transportation tasks such as in conjunction with photo lithography systems (e.g. extreme ultra violet (EUV) machines).

Abstract: A highly portable advanced adult and pediatric compact ECLS system is based around an integrated pump-oxygenator. The system includes a central a blood inlet and flow path extending along a general longitudinal axis of the system; a pump housing defining a pump inlet in fluid communication with the central blood flow path; an impeller rotationally received within the area of the pump inlet, wherein the impeller is magnetically supported and magnetically driven; an array of hollow fiber membranes configured for gas transfer within the system for oxygenation of blood flowing across the hollow fiber membranes, wherein the membranes include a covalently-bonded heparin-based bioactive surface, and wherein the blood flow path extends from the impeller to a position to flow perpendicular over the array of hollow fiber membranes; and a blood outlet configured to receive blood flowing past the array of hollow fiber membranes.

Abstract: A motor system can include a bearingless stator having a plurality of magnetic windings including rotation windings and suspension windings; a dipole interior permanent magnet (IPM) rotor positioned within the stator, the rotor having a plurality of permanent magnets disposed within a cylindrical structure; one or more position sensors to measure radial and angular position of the rotor; and a controller configured to receive measurements from the one or more position sensors and to generate current commands for the stator to excite the rotation windings to generate torque and to excite the suspension windings to stabilize the rotor within the stator.

Abstract: A reticle transport system having a magnetically levitated transportation stage is disclosed. Such a system may be suitable for use in vacuum environments, for example, ultra-clean vacuum environments.

Abstract: A reticle transport system having a magnetically levitated transportation stage is disclosed. Such a system may be suitable for use in vacuum environments, for example, ultra-clean vacuum environments. A magnetic levitated linear motor functions to propel the transportation stage in a linear direction along a defined axis of travel and to magnetically levitate the transportation stage.

Abstract: High force and low noise linear fine-tooth motors are described herein. Such motors can include armatures having fine teeth separated by narrow slots such that a ratio of a pitch between teeth and a pitch between permanent magnet poles is less than that of a conventional iron-core linear motor. In one embodiment, such a linear motor can include a first component having an armature including a plurality of iron cores surrounded by coil windings, and a second component having a plurality of permanent magnets with alternating polarity. The plurality of iron cores can be spaced apart from one another by an iron core pitch distance and the plurality of permanent magnets can be spaced apart from one another by a permanent magnet pole pitch distance, and a ratio of the iron core pitch to the magnetic pole pitch can be less than 1.33.

Abstract: A motor system can include a bearingless stator having a plurality of magnetic windings including rotation windings and suspension windings; a dipole interior permanent magnet (IPM) rotor positioned within the stator, the rotor having a plurality of permanent magnets disposed within a cylindrical structure; one or more position sensors to measure radial and angular position of the rotor; and a controller configured to receive measurements from the one or more position sensors and to generate current commands for the stator to excite the rotation windings to generate torque and to excite the suspension windings to stabilize the rotor within the stator.

Abstract: A reticle transport system having a magnetically levitated transportation stage is disclosed. Such a system may be suitable for use in vacuum environments, for example, ultra-clean vacuum environments.

Abstract: Described herein is a magnetically levitated linear transportation stage which utilizes a permanent magnet bias flux to generate a passive magnetic/suspension force/torque in a first set of directions orthogonal to a direction of transportation stage travel, a motor flux which forms a traveling wave along a direction of transportation stage travel and a suspension control force orthogonal to the direction of transportation stage travel. Such a magnetically levitated linear transportation stage is suitable for use in in-vacuum transportation tasks such as in conjunction with photo lithography systems (e.g. extreme ultra violet (EUV) machines).