Abstract: A method utilizing characteristic x-ray emission from a single thin film or multilayer thin film when an electron beam impinges at a grazing angle with respect to the surface of the sample to capture structural and physical properties of the layers such as layer thickness, interfacial roughness, and stoichiometry of the sample.

Abstract: A method utilizing characteristic x-ray emission from a single thin film or multilayer thin film when an electron beam impinges at a grazing angle with respect to the surface of the sample to capture structural and physical properties of the layers such as layer thickness, interfacial roughness, and stoichiometry of the sample.

Abstract: A microcantilever sensor for targeted analyte detection can generally comprise a microcantilever having a base and a beam, a metallic coating disposed substantially only on a first surface of a distal-most end of the beam, and a receptor compound immobilized to the metallic coating wherein the receptor compound can have substantially exclusive binding interaction with the analyte. The receptor compound can be a thiol-terminated bifunctional compound having a receptor site with specific binding affinity for the analyte, for example, an isolated Fab? fragment. The metallic coating can be a noble metal and/or a semi-noble metal, such as a bilayer of chromium and gold. The metallic coating can be applied to the microcantilever surface by electron-beam lithography.