Patents by Inventor David Lee Drum

David Lee Drum has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods of processing a substrate using a flat surface air bearing assembly
    Patent number: 8191227
    Abstract: A method of processing a substrate, including supporting a substrate using an air bearing produced via an air bearing assembly, the air bearing assembly having: an upper portion having a plurality of air supply and vacuum holes therethrough; a lower portion; and a plurality of spacers disposed between and maintaining the upper and lower portions in spaced relation, wherein a density of the air supply and vacuum holes is high enough to provide an air bearing for a substrate, but low enough such that at least one of: (i) a sufficient number of the spacers are employed, and (ii) the spacers are located in close enough proximity, to maintain a substantially uniform flatness of the upper portion relative to the lower portion.
    Type: Grant
    Filed: April 9, 2010
    Date of Patent: June 5, 2012
    Assignee: Corning Incorporated
    Inventors: Douglas E. Brackley, David Lee Drum, Paul J McCarthy
  • FLAT SURFACE AIR BEARING ASSEMBLY
    Publication number: 20100196135
    Abstract: An air bearing assembly includes: an upper portion having a plurality of air supply and vacuum holes therethrough; a lower portion; and a plurality of spacers disposed between and maintaining the upper and lower portions in spaced relation, wherein a density of the air supply and vacuum holes is high enough to provide an air bearing for a substrate, but low enough such that at least one of: (i) a sufficient number of the spacers are employed, and (ii) the spacers are located in close enough proximity, to maintain a substantially uniform flatness of the upper portion relative to the lower portion.
    Type: Application
    Filed: April 9, 2010
    Publication date: August 5, 2010
    Inventors: Douglas E. Brackley, David Lee Drum, Paul J. McCarthy
  • Flat surface air bearing assembly
    Patent number: 7722256
    Abstract: An air bearing assembly includes: an upper portion having a plurality of air supply and vacuum holes therethrough; a lower portion; and a plurality of spacers disposed between and maintaining the upper and lower portions in spaced relation, wherein a density of the air supply and vacuum holes is high enough to provide an air bearing for a substrate, but low enough such that at least one of: (i) a sufficient number of the spacers are employed, and (ii) the spacers are located in close enough proximity, to maintain a substantially uniform flatness of the upper portion relative to the lower portion.
    Type: Grant
    Filed: November 17, 2006
    Date of Patent: May 25, 2010
    Assignee: Corning Incorporated
    Inventors: Douglas E Brackley, David Lee Drum, Paul J McCarthy
  • Flat surface air bearing assembly
    Publication number: 20080117551
    Abstract: An air bearing assembly includes: an upper portion having a plurality of air supply and vacuum holes therethrough; a lower portion; and a plurality of spacers disposed between and maintaining the upper and lower portions in spaced relation, wherein a density of the air supply and vacuum holes is high enough to provide an air bearing for a substrate, but low enough such that at least one of: (i) a sufficient number of the spacers are employed, and (ii) the spacers are located in close enough proximity, to maintain a substantially uniform flatness of the upper portion relative to the lower portion.
    Type: Application
    Filed: November 17, 2006
    Publication date: May 22, 2008
    Inventors: Douglas E. Brackley, David Lee Drum, Paul J. McCarthy