Abstract: Spectrometers include an optical assembly with optical elements arranged to receive light from a light source and direct the light along a light path to a multi-element detector, dispersing light of different wavelengths to different spatial locations on the multi-element detector. The optical assembly includes: (i) a collimator arranged in the light path to receive the light from the light source, the collimator including a mirror having a freeform surface; (2) a dispersive sub-assembly including an echelle grating, the dispersive sub-assembly being arranged in the light path to receive light from the collimator; and (3) a Schmidt telescope arranged in the light path to receive light from the dispersive sub-assembly and focus the light to a field, the multi-element detector being arranged at the field.

Abstract: Spectrometers include an optical assembly with optical elements arranged to receive light from a light source and direct the light along a light path to a multi-element detector, dispersing light of different wavelengths to different spatial locations on the multi-element detector. The optical assembly includes: (i) a collimator arranged in the light path to receive the light from the light source, the collimator including a mirror having a freeform surface; (2) a dispersive sub-assembly including an echelle grating, the dispersive sub-assembly being arranged in the light path to receive light from the collimator; and (3) a Schmidt telescope arranged in the light path to receive light from the dispersive sub-assembly and focus the light to a field, the multi-element detector being arranged at the field.

Abstract: A flow cell assembly for use in a liquid sample analyzer including a radiation source, a sensing device and a liquid sample source to supply a liquid sample includes an entrance joint member, a liquid core waveguide, a liquid sample feed tube, and an input optical fiber. The entrance joint member includes a waveguide receiving bore and a feed tube receiving bore. The liquid core waveguide is mounted in the waveguide receiving bore and defines a waveguide bore. The liquid sample feed tube is mounted in the feed tube receiving bore such that the liquid sample feed tube is in fluid communication with the waveguide bore to fluidly connect the liquid sample source to the waveguide bore. The input optical fiber is mounted in the entrance joint member to transmit radiation from the radiation source to the waveguide bore, which radiation is transmitted through the waveguide bore and the liquid sample therein to the sensing device.

Abstract: A flow cell assembly for use in a liquid sample analyzer including a radiation source, a sensing device and a liquid sample source to supply a liquid sample includes an entrance joint member, a liquid core waveguide, a liquid sample feed tube, and an input optical fiber. The entrance joint member includes a waveguide receiving bore and a feed tube receiving bore. The liquid core waveguide is mounted in the waveguide receiving bore and defines a waveguide bore. The liquid sample feed tube is mounted in the feed tube receiving bore such that the liquid sample feed tube is in fluid communication with the waveguide bore to fluidly connect the liquid sample source to the waveguide bore. The input optical fiber is mounted in the entrance joint member to transmit radiation from the radiation source to the waveguide bore, which radiation is transmitted through the waveguide bore and the liquid sample therein to the sensing device.

Abstract: A flow cell assembly for use in a liquid sample analyzer including a radiation source, a sensing device and a liquid sample source to supply a liquid sample includes an entrance joint member, a liquid core waveguide, a liquid sample feed tube, and an input optical fiber. The entrance joint member includes a waveguide receiving bore and a feed tube receiving bore. The liquid core waveguide is mounted in the waveguide receiving bore and defines a waveguide bore. The liquid sample feed tube is mounted in the feed tube receiving bore such that the liquid sample feed tube is in fluid communication with the waveguide bore to fluidly connect the liquid sample source to the waveguide bore. The input optical fiber is mounted in the entrance joint member to transmit radiation from the radiation source to the waveguide bore, which radiation is transmitted through the waveguide bore and the liquid sample therein to the sensing device.

Abstract: A flow cell assembly for use in a liquid sample analyzer including a radiation source, a sensing device and a liquid sample source to supply a liquid sample includes an entrance joint member, a liquid core waveguide, a liquid sample feed tube, and an input optical fiber. The entrance joint member includes a waveguide receiving bore and a feed tube receiving bore. The liquid core waveguide is mounted in the waveguide receiving bore and defines a waveguide bore. The liquid sample feed tube is mounted in the feed tube receiving bore such that the liquid sample feed tube is in fluid communication with the waveguide bore to fluidly connect the liquid sample source to the waveguide bore. The input optical fiber is mounted in the entrance joint member to transmit radiation from the radiation source to the waveguide bore, which radiation is transmitted through the waveguide bore and the liquid sample therein to the sensing device.

Abstract: A flow cell assembly for use in a liquid sample analyzer including a radiation source, a sensing device and a liquid sample source to supply a liquid sample includes an entrance joint member, a liquid core waveguide, a liquid sample feed tube, and an input optical fiber. The entrance joint member includes a waveguide receiving bore and a feed tube receiving bore. The liquid core waveguide is mounted in the waveguide receiving bore and defines a waveguide bore. The liquid sample feed tube is mounted in the feed tube receiving bore such that the liquid sample feed tube is in fluid communication with the waveguide bore to fluidly connect the liquid sample source to the waveguide bore. The input optical fiber is mounted in the entrance joint member to transmit radiation from the radiation source to the waveguide bore, which radiation is transmitted through the waveguide bore and the liquid sample therein to the sensing device.

Abstract: A flow cell assembly for use in a liquid sample analyzer including a radiation source, a sensing device and a liquid sample source to supply a liquid sample includes an entrance joint member, a liquid core waveguide, a liquid sample feed tube, and an input optical fiber. The entrance joint member includes a waveguide receiving bore and a feed tube receiving bore. The liquid core waveguide is mounted in the waveguide receiving bore and defines a waveguide bore. The liquid sample feed tube is mounted in the feed tube receiving bore such that the liquid sample feed tube is in fluid communication with the waveguide bore to fluidly connect the liquid sample source to the waveguide bore. The input optical fiber is mounted in the entrance joint member to transmit radiation from the radiation source to the waveguide bore, which radiation is transmitted through the waveguide bore and the liquid sample therein to the sensing device.

Abstract: An optical metrology includes a library, a metrology tool and a library evolution tool. The library is generated to include a series of predicted measurements. Each predicted measurement is intended to match the measurements that a metrology device would record when analyzing a corresponding physical structure. The metrology tool compares its empirical measurements to the predicted measurements in the library. If a match is found, the metrology tool extracts a description of the corresponding physical structure from the library. The library evolution tool operates to improve the efficiency of the library. To make these improvements, the library evolution tool statistically analyzes the usage pattern of the library. Based on this analysis, the library evolution tool increases the resolution of commonly used portions of the library. The library evolution tool may also optionally reduce the resolution of less used portions of the library.

Abstract: A process for forming a multilayer composite coating on a substrate is provided. The process includes forming an electrodeposition coating layer on the substrate by electrodeposition of a curable electrodepositable coating composition over at least a portion of the substrate. Optionally, the coated substrate is heated to a temperature and for a time sufficient to cure the electrodeposition coating layer. A basecoating layer is formed on the electrodeposition coating layer by depositing an aqueous curable basecoating composition directly onto at least a portion of the electrodeposition coating layer. Optionally, the basecoating layer is dehydrated. A top coating layer is formed on the basecoating layer by depositing a curable top coating composition which is substantially pigment-free directly onto at least a portion of the basecoating layer. The top coating layer, the basecoating layer, and, optionally, the electrodeposition coating layer are cured simultaneously.

Abstract: A process for forming a multilayer composite coating on a substrate is provided. The process includes forming an electrodeposition coating layer on the substrate by electrodeposition of a curable electrodepositable coating composition over at least a portion of the substrate. Optionally, the coated substrate is heated to a temperature and for a time sufficient to cure the electrodeposition coating layer. A basecoating layer is formed on the electrodeposition coating layer by depositing an aqueous curable basecoating composition directly onto at least a portion of the electrodeposition coating layer. Optionally, the basecoating layer is dehydrated. A top coating layer is formed on the basecoating layer by depositing a curable top coating composition which is substantially pigment-free directly onto at least a portion of the basecoating layer. The top coating layer, the basecoating layer, and, optionally, the electrodeposition coating layer are cured simultaneously.

Abstract: A process for forming a multilayer composite coating on a substrate is provided. The process includes forming an electrodeposition coating layer on the substrate by electrodeposition of a curable electrodepositable coating composition over at least a portion of the substrate. Optionally, the coated substrate is heated to a temperature and for a time sufficient to cure the electrodeposition coating layer. A basecoating layer is formed on the electrodeposition coating layer by depositing an aqueous curable basecoating composition directly onto at least a portion of the electrodeposition coating layer. Optionally, the basecoating layer is dehydrated. A top coating layer is formed on the basecoating layer by depositing a curable top coating composition which is substantially pigment-free directly onto at least a portion of the basecoating layer. The top coating layer, the basecoating layer, and, optionally, the electrodeposition coating layer are cured simultaneously.

Abstract: A flat spectrum illumination source for use in optical metrology systems includes a first light source generating a visible light beam and a second light source generating an ultraviolet light beam. The illumination source also includes an auxiliary light source generating a light beam at wavelengths between the visible light beam and the ultraviolet light beam. The three light beams are combined to provide a broadband probe beam that has substantially even illumination levels across a broad range of wavelengths. Alternately, the illumination source may be fabricated as an array of light emitting diodes selected to cover a range of separate wavelengths. The outputs of the LED array are combined to produce the broadband probe beam.

Abstract: An optical metrology includes a library, a metrology tool and a library evolution tool. The library is generated to include a series of predicted measurements. Each predicted measurement is intended to match the measurements that a metrology device would record when analyzing a corresponding physical structure. The metrology tool compares its empirical measurements to the predicted measurements in the library. If a match is found, the metrology tool extracts a description of the corresponding physical structure from the library. The library evolution tool operates to improve the efficiency of the library. To make these improvements, the library evolution tool statistically analyzes the usage pattern of the library. Based on this analysis, the library evolution tool increases the resolution of commonly used portions of the library. The library evolution tool may also optionally reduce the resolution of less used portions of the library.

Abstract: The subject invention relates to broadband optical metrology tools for performing measurements of patterned thin films on semiconductor integrated circuits. Particularly a family of optical designs for broadband, multi-wavelength, DUV-IR (185<?<900 nm) all-refractive optical systems. The designs have net focusing power and this is achieved by combining at least one positively powered optical element with one negatively powered optical element. The designs have small spot-size over the wavelength range spanning 185-900 nm with substantially reduced spherical aberration, axial color, sphero-chromatism and zonal spherical aberration. The refractive optical systems are broadly applicable to a large class of broadband optical wafer metrology tools including spectrophotometers, spectroscopic reflectometers, spectroscopic ellipsometers and spectroscopic scatterometers.

Abstract: A method and apparatus for combining the spectral outputs of multiple light sources to provide a high-efficiency broad-band illuminator for optical metrology is disclosed. The illuminator combines the output radiation from a plurality of broad-band lamps in a novel optical arrangement that creates a virtual source and avoids the use of beam-splitters. Consequently, the illuminator offers increased performance at reduced cost. The illuminator can be optimized and configured for application in a broad class of optical metrology instruments.

Abstract: A process for forming a multilayer composite coating on a substrate is provided. The process includes forming an electrodeposition coating layer on the substrate by electrodeposition of a curable electrodepositable coating composition over at least a portion of the substrate. Optionally, the coated substrate is heated to a temperature and for a time sufficient to cure the electrodeposition coating layer. A basecoating layer is formed on the electrodeposition coating layer by depositing an aqueous curable basecoating composition directly onto at least a portion of the electrodeposition coating layer. Optionally, the basecoating layer is dehydrated. A top coating layer is formed on the basecoating layer by depositing a curable top coating composition which is substantially pigment-free directly onto at least a portion of the basecoating layer. The top coating layer, the basecoating layer, and, optionally, the electrodeposition coating layer are cured simultaneously.

Abstract: A flat spectrum illumination source for use in optical metrology systems includes a first light source generating a visible light beam and a second light source generating an ultraviolet light beam. The illumination source also includes an auxiliary light source generating a light beam at wavelengths between the visible light beam and the ultraviolet light beam. The three light beams are combined to provide a broadband probe beam that has substantially even illumination levels across a broad range of wavelengths. Alternately, the illumination source may be fabricated as an array of light emitting diodes selected to cover a range of separate wavelengths. The outputs of the LED array are combined to produce the broadband probe beam.

Abstract: The subject invention relates to the design of a compact imaging spectrometer for use in thin film measurement and general spectroscopic applications. The spectrometer includes only two elements, a rotationally symmetric aspheric reflector and a plane grating. When employed in a pupil centric geometry the spectrometer has no coma or image distortion. Both spherical aberration and astigmatism can be independently corrected.

Abstract: The subject invention relates to broadband optical metrology tools for performing measurements of patterned thin films on semiconductor integrated circuits. Particularly a family of optical designs for broadband, multi-wavelength, DUV-IR (185<&lgr;<900 nm) all-refractive optical systems. The designs have net focusing power and this is achieved by combining at least one positively powered optical element with one negatively powered optical element. The designs have small spot-size over the wavelength range spanning 185-900 nm with substantially reduced spherical aberration, axial color, sphero-chromatism and zonal spherical aberration. The refractive optical systems are broadly applicable to a large class of broadband optical wafer metrology tools including spectrophotometers, spectroscopic reflectometers, spectroscopic ellipsometers and spectroscopic scatterometers.