Abstract: A method of actuating an article using a servo actuation system is disclosed. The system comprises a motor, a controller and an inverter. The controller comprises a position controller, a velocity controller and a current controller; the position controller outputs velocity demands to the velocity controller, the velocity controller outputs current demands to the current controller, and the current controller outputs voltage demands to the inverter. The inverter outputs inverted voltage demands to the motor. The method comprises: determining a parameter downstream of the inverter; calculating a limiting value from the parameter and a defined supply power limit; and applying the limiting value in the controller to ensure that the power drawn by the servo actuation system remains within the defined supply power limit.

Abstract: An electrical drive system includes an electric motor having an armature, which is mounted on a stator, and a rotor, wherein aligning stator flux with rotor flux enables current to flow in the armature without inducing torque on the rotor shaft. The disclosed operation may be used, for example, in testing the electrical drive system. The electric drive system can carry full rated current yet produce little or no torque, thereby increasing the current that can be tested during electrical drive test procedures without producing undesired forces or motion. The method may be used, for example, in heating the electric motor, for example for de-icing.

Abstract: An electrical drive system includes an electric motor having an armature, which is mounted on a stator, and a rotor, wherein aligning stator flux with rotor flux enables current to flow in the armature without inducing torque on the rotor shaft. The disclosed operation may be used, for example, in testing the electrical drive system. The electric drive system can carry full rated current yet produce little or no torque, thereby increasing the current that can be tested during electrical drive test procedures without producing undesired forces or motion. The method may be used, for example, in heating the electric motor, for example for de-icing.

Abstract: A method and apparatus are provided for protecting internal aluminum components of a plasma reactor from plasma-induced erosion. The components are coated, first with a dielectric layer, then with a thin layer of one or more metals selected from the group consisting of gold, chromium, platinum, silver and rhenium. The dielectric layer may either be grown or deposited. The metal layer is deposited, preferably using evaporative deposition.

Abstract: The present invention comprises a wafer boat, bath, or related components that are covered with a fluoropolymer coating. In a preferred form, the components have standard quartz structures that are covered with a protective fluoropolymer coating. In alternate embodiments, glass, plastic, or even metal is used for the structure of the boat or related components, then covered with a protective layer of fluoropolymer. In accordance with another preferred aspect, the coating is clear. In alternate embodiments, however, the coating includes a pigment. In some preferred embodiments, the coating comprises multiple layers with different colors for each layer so that wear will be readily apparent.

Abstract: This invention comprises a coating for equipment parts, particularly including chemical mechanical polishing equipment parts and other equipment that may experience wear or contaminant build-up. The coating includes a fluoropolymer based material that may also contain a colorant or pigment to visually contrast with particles or slurry that is deposited on the parts during use. In some embodiments, multiple layers are applied in contrasting colors so that when a layer closer to the surface begins to wear a lower layer will be readily visible, signaling that re-coating or replacement will soon be required.

Abstract: An improved interconnection system for attaching an improved cylindrical magnetron target to a rotatable flanged spindle incorporates an annular extension on the target, which fits over the edge of the spindle flange, facilitates centering the target on the spindle, and helps shield target sealing surfaces. The annular extension terminates in an inwardly-angled circumferential step. The target-spindle interconnection system includes a split clamping collar and a generally annular retainer ring that slidable over the spindle shaft and rotatable against the spindle flange, the retainer ring having external circumferential threads that are angled away from the flange. The split clamping collar has, at one end, an inwardly-angled lip that engages the overhanging step and, at the other end, inwardly-angled, internal, circumferential threads that engage the threads of the retainer ring to draw the target and spindle together as a unified assembly as the retainer ring is rotated.

Abstract: Planar magnetron targets are disclosed which include a backing plate which is grooved in the regions where erosion of the target material mainly occurs, thereby permitting greater erosion depth of the target material. The life of the target material may be further extended by employing an in-relief upper surface for the target material. The in-relief surface may be prepared by a number of well-known techniques, which include casting and computer-controlled plasma spray. The target material may be either sprayed on or bonded to the backing plate. For a preferred embodiment of the invention, the backing plate is grooved to create undercut ledges which retain the target material on the backing plate, even if adhesion between the surfaces of the target material and the backing plate material fails as the result of thermal cycling.

Abstract: A method and apparatus are provided for protecting internal aluminum components of a plasma reactor from plasma-induced erosion. The components are coated, first with a dielectric layer, then with a thin layer of one or more metals selected from the group consisting of gold, chromium, platinum, silver and rhenium. The dielectric layer may either be grown or deposited. The metal layer is deposited, preferably using evaporative deposition.

Abstract: This invention comprises a coating for equipment parts, particularly including chemical mechanical polishing equipment parts and other equipment that may experience wear or contaminant build-up. The coating includes a fluoropolymer based material that may also contain a colorant or pigment to visually contrast with particles or slurry that is deposited on the parts during use. In some embodiments, multiple layers are applied in contrasting colors so that when a layer closer to the surface begins to wear a lower layer will be readily visible, signaling that re-coating or replacement will soon be required.

Abstract: A fluid-tight union for reversably interconnecting lengths of coaxial pipe includes: a first annular fitting, having a circumferential flange, attachable to a connection end of a first length of pipe; a second annular fitting, having a circumferential shoulder, attachable to a connection end of a second length of pipe; a clamping collar comprised of arcuate segments which incorporate both an inwardly-angled clamping ledge that engages an overhanging step on the circumferential shoulder of the second annular fitting and at least one internal, inwardly-angled, spiral, circumferential thread spaced apart from the clamping ledge; and a retainer ring sized so as to be slidable over the first annular fitting, and rotatable against the rear face of the circumferential flange, the retainer ring incorporating external, spiral, circumferential threads that are angled away from the flange, the external threads of the retainer ring engaging the internal threads of the clamping collar to draw the clamping ledge and engage

Abstract: An improved interconnection system for attaching an improved cylindrical magnetron target to a rotatable flanged spindle incorporates an annular extension on the target, which fits over the edge of the spindle flange, facilitates centering the target on the spindle, and helps shield target sealing surfaces. The annular extension terminates in an inwardly-angled circumferential step. The target-spindle interconnection system includes a split clamping collar and a generally annular retainer ring that slidable over the spindle shaft and rotatable against the spindle flange, the retainer ring having external circumferential threads that are angled away from the flange. The split clamping collar has, at one end, an inwardly-angled lip that engages the overhanging step and, at the other end, inwardly-angled, internal, circumferential threads that engage the threads of the retainer ring to draw the target and spindle together as a unified assembly as the retainer ring is rotated.

Abstract: A fluid-tight pipe union includes: first and second annular fittings attachable to a connection ends of first and second lengths of pipe, respectively, the fitting mating together at a junction, the first fitting incorporating a circumferential flange, said flange having a rear face and front face which faces said second length of pipe, the second fitting having a circumferential shoulder terminating in an inwardly-angled, overhanging circumferential step that faces away from said junction; a clamping collar comprised of arcuate segments, which are collectively sized to generally and coaxially surround both said first and second fittings, the collar incorporating, both an inwardly-angled clamping ledge that engages the overhanging step of the second fitting and at least one internal, inwardly-angled, spiral, circumferential thread spaced apart from said clamping ledge; and a retainer ring sized so as to be slidable over said first fitting, and rotatable against the rear face of said circumferential flange, sa

Abstract: An improved interconnection system for attaching an improved cylindrical magnetron target to a rotatable flanged spindle incorporates an annular extension on the target, which fits over the edge of the spindle flange, facilitates centering the target on the spindle, and helps shield target sealing surfaces. The annular extension terminates in an inwardly-angled circumferential step. The target-spindle interconnection system includes a split clamping collar and generally annular retainer ring that slidable over the spindle shaft and rotatable against the spindle flange, the retainer ring having external circumferential threads that are angled away from the flange. The split clamping collar has, at one end, an inwardly-angled lip that engages the overhanging step and, at the other end, inwardly-angled, internal, circumferential threads that engage the threads of the retainer ring to draw the target and spindle together as a unified assembly as the retainer ring is rotated.