Patents by Inventor David Masayuki ISHIKAWA

David Masayuki ISHIKAWA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10710307
    Abstract: An additive manufacturing apparatus includes a platform, a dispenser to dispense successive layers of feed material on the platform, a heat source above the platform, an energy source to emit a beam of energy to impinge a second region of the topmost layer, a sensor system to measure temperatures of the topmost layer of feed material and to measure a dimension of a melt pool in the second region, and a controller. The heat source is configured to deliver energy to a first region of a topmost layer of the successive layers of feed material to pre-heat and/or heat-treat the first region. The controller is configured to operate the heat source to heat the topmost layer of feed material based on the measured temperatures, and operate the energy source to fuse feed material in the topmost layer based on the measured dimension.
    Type: Grant
    Filed: August 11, 2017
    Date of Patent: July 14, 2020
    Assignee: Applied Materials, Inc.
    Inventors: David Masayuki Ishikawa, Todd J. Egan, Paul J. Steffas
  • Publication number: 20200189874
    Abstract: A method and apparatus for continuous web processing systems for pre-lithiating Li-ion battery substrates is provided. The modular processing system comprises a common transfer chamber body defining a transfer volume. The system further comprises a first vertical chamber body defining a first processing volume and positioned on the common transfer chamber body. The transfer volume is in fluid communication with the first processing volume. The system further comprises a second vertical chamber body defining a second processing volume and positioned on the common transfer chamber body. The transfer volume is in fluid communication with the second processing volume. The system further comprises a reel-to-reel system operable to transport a continuous flexible substrate having an electrode structure formed thereon.
    Type: Application
    Filed: December 2, 2019
    Publication date: June 18, 2020
    Inventors: David Masayuki ISHIKAWA, Ezhiylmurugan RANGASAMY, Thomas GOIHL, Subramanya P. HERLE
  • Publication number: 20190376182
    Abstract: A reactor for coating particles includes one or more motors, a rotary vacuum chamber configured to hold particles to be coated and coupled to the motors, a controller configured to cause the motors to rotate the chamber in a first direction about an axial axis at a rotation speed sufficient to force the particles to be centrifuged against an inner diameter of the chamber, a vacuum port to exhaust gas from the rotary vacuum chamber, a paddle assembly including a rotatable drive shaft extending through the chamber and coupled to the motors and at least one paddle extending radially from the drive shaft, such that rotation of the drive shaft by the motors orbits the paddle about the drive shaft in a second direction, and a chemical delivery system including a gas outlet on the paddle configured inject process gas into the particles.
    Type: Application
    Filed: June 11, 2019
    Publication date: December 12, 2019
    Inventors: Colin C. Neikirk, Pravin K. Narwankar, Kaushal Gangakhedkar, Visweswaren Sivaramakrishnan, Jonathan Frankel, David Masayuki Ishikawa, Quoc Truong, Joseph Yudovsky
  • Publication number: 20190376181
    Abstract: A reactor for coating particles includes one or more motors, a rotary vacuum chamber configured to hold particles to be coated, wherein the rotary vacuum chamber is coupled to the motors, a controller configured to cause the motors to rotate the rotary vacuum chamber about an axial axis of the rotary vacuum chamber such that the particles undergo tumbling agitation, a vacuum port to exhaust gas from the rotary vacuum chamber, a paddle assembly including a rotatable drive shaft extending through the rotary vacuum chamber and coupled to the motors and at least one paddle extending radially from the drive shaft, such that rotation of the drive shaft by the motors orbits the paddle about the drive shaft in a second direction, and a chemical delivery system including a gas outlet on the paddle configured inject process gas into the particles.
    Type: Application
    Filed: June 11, 2019
    Publication date: December 12, 2019
    Inventors: Colin C. Neikirk, Pravin K. Narwankar, Kaushal Gangakhedkar, Visweswaren Sivaramakrishnan, Jonathan Frankel, David Masayuki Ishikawa, Quoc Truong, Joseph Yudovsky
  • Publication number: 20190366434
    Abstract: An additive manufacturing apparatus includes a platform, a dispenser configured to deliver a plurality of successive layers of feed material on the platform, at least one energy source to selectively fuse feed material in a layer on the platform, and an air knife supply unit. The air knife supply unit includes a tube having a plurality of holes spaced along a length of the tube, a multi-fluted helical screw positioned in the tube, a gas inlet configured to supply a gas into an end of the tube with the screw configured to guide the gas from the gas inlet through the tube and out the holes, and a spiral plenum surrounding the tube with the spiral plenum including an inner end to receive gas from the holes and an outer end to deliver the gas over the platform.
    Type: Application
    Filed: May 31, 2019
    Publication date: December 5, 2019
    Inventors: Bahubali S. Upadhye, Sumedh Acharya, Sandip Desai, David Masayuki Ishikawa, Eric NG, Hou T. Ng
  • Patent number: 10478937
    Abstract: A chemical mechanical polishing apparatus includes a platen to support a polishing pad, and an in-situ acoustic emission monitoring system including an acoustic emission sensor supported by the platen, a waveguide configured to extending through at least a portion of the polishing pad, and a processor to receive a signal from the acoustic emission sensor. The in-situ acoustic emission monitoring system is configured to detect acoustic events caused by deformation of the substrate and transmitted through the waveguide, and the processor is configured to determine a polishing endpoint based on the signal.
    Type: Grant
    Filed: March 5, 2015
    Date of Patent: November 19, 2019
    Assignee: Applied Materials, Inc.
    Inventors: Jianshe Tang, David Masayuki Ishikawa, Benjamin Cherian, Jeonghoon Oh, Thomas H. Osterheld
  • Publication number: 20190284692
    Abstract: A gas distribution assembly for applying a coating on an interior of a plurality of components includes a support with a plurality of component cavities formed within the support. Each component cavity corresponds to a respective component to fluidly couple with an interior of the respective component. A first gas source flow line is fluidly coupled with each of the component cavities to provide a first gas from a first gas source to each of the component cavities, and a second gas source flow line is fluidly coupled with each of the component cavities to provide a second gas from a second gas source to each of the component cavities.
    Type: Application
    Filed: March 18, 2019
    Publication date: September 19, 2019
    Inventors: Yuriy MELNIK, Sukti CHATTERJEE, Kaushal GANGAKHEDKAR, Jonathan FRANKEL, Lance A. SCUDDER, Pravin K. NARWANKAR, David Alexander BRITZ, David Masayuki ISHIKAWA
  • Publication number: 20190160539
    Abstract: An additive manufacturing apparatus includes a platform, a dispenser configured to deliver a plurality of successive layers of feed material onto the platform, a light source assembly to generate a first light beam and a second light beam, a beam combiner configured to combine the first light beam and the second light beam into a common light beam, and a mirror scanner configured to direct the common light beam towards the platform to deliver energy along a scan path on an outermost layer of feed material.
    Type: Application
    Filed: November 26, 2018
    Publication date: May 30, 2019
    Inventors: Wei-Sheng Lei, Kashif Maqsood, David Masayuki Ishikawa
  • Publication number: 20190105754
    Abstract: A retaining ring for a polishing process is disclosed. The retaining ring includes a body comprising an upper portion and a lower portion, and a sacrificial surface disposed on the lower portion, the sacrificial surface comprising a negative tapered surface having a taper height that is about 0.0003 inches to about 0.00015 inches.
    Type: Application
    Filed: December 5, 2018
    Publication date: April 11, 2019
    Inventors: David Masayuki ISHIKAWA, Jeonghoon OH, Garrett Ho Yee SIN, Charles C. GARRETSON, Huanbo ZHANG, Chia-Ling PAI, Niraj PRASAD, Julio David MUZQUIZ
  • Patent number: 10252397
    Abstract: A retaining ring for a polishing process is disclosed. The retaining ring includes a body comprising an upper portion and a lower portion, and a sacrificial surface disposed on the lower portion, the sacrificial surface comprising a negative tapered surface having a taper height that is about 0.0003 inches to about 0.00015 inches.
    Type: Grant
    Filed: October 9, 2015
    Date of Patent: April 9, 2019
    Assignee: Applied Materials, Inc.
    Inventors: David Masayuki Ishikawa, Jeonghoon Oh, Garrett Ho Yee Sin, Charles C. Garretson, Huanbo Zhang, Chia-Ling Pai, Niraj Prasad, Julio David Muzquiz
  • Publication number: 20190047226
    Abstract: An additive manufacturing apparatus includes a platform, a dispenser to dispense successive layers of feed material on the platform, a heat source above the platform, an energy source to emit a beam of energy to impinge a second region of the topmost layer, a sensor system to measure temperatures of the topmost layer of feed material and to measure a dimension of a melt pool in the second region, and a controller. The heat source is configured to deliver energy to a first region of a topmost layer of the successive layers of feed material to pre-heat and/or heat-treat the first region. The controller is configured to operate the heat source to heat the topmost layer of feed material based on the measured temperatures, and operate the energy source to fuse feed material in the topmost layer based on the measured dimension.
    Type: Application
    Filed: August 11, 2017
    Publication date: February 14, 2019
    Inventors: David Masayuki Ishikawa, Todd J. Egan, Paul J. Steffas
  • Publication number: 20180369915
    Abstract: A method of additive manufacturing includes storing a plurality of predetermined cell processing recipes, dispensing a layer of a plurality of successive layers of feed material on a platform, receiving data describing an area of the layer of the feed material to fuse, determining a combination of a plurality of non-overlapping cells that substantially cover the area, and sequentially processing the plurality of cells. Each cell processing recipe includes scan path data indicating a path for an energy beam to follow, and different cell processing recipes having different paths for the energy beam. Each cell of the plurality of cells gets an associated cell processing recipe selected from the plurality of predetermined cell processing recipes. Each cell is processed by causing an energy beam to follow the first path for the cell processing recipe associated with the cell.
    Type: Application
    Filed: May 29, 2018
    Publication date: December 27, 2018
    Inventors: David Masayuki Ishikawa, Paul J. Steffas, Ajey M. Joshi
  • Publication number: 20180369960
    Abstract: An additive manufacturing system includes a platform, a dispenser to dispense a plurality of layers of feed material on a top surface of the platform, a light source to generate a first light beam and a second light beam, a polygon mirror scanner, a galvo mirror scanner positioned adjacent to the polygon mirror scanner, and a controller. The controller is coupled to the light source, the polygon mirror scanner and the galvo mirror scanner, and the controller is configured to cause the light source and polygon mirror scanner to apply the first light beam to a region of the layer of feed material, and to cause the light source and galvo mirror scanner to apply the second light beam to at least a portion of the region of the layer of feed material.
    Type: Application
    Filed: April 13, 2018
    Publication date: December 27, 2018
    Inventors: David Masayuki Ishikawa, Paul J. Steffas, Nag B. Patibandla
  • Publication number: 20180369961
    Abstract: An additive manufacturing apparatus and methods relating to forming multiple layers on an object on a support including dispensing a layer of feed material over the support, fusing a portion of the layer of feed material to form a fused portion in the layer, determining to rework a particular region in the fused portion, and reworking the particular region. Reworking the particular region includes establishing a gas flow directed towards the particular region and producing a melt pool having a keyhole within the particular region.
    Type: Application
    Filed: May 25, 2018
    Publication date: December 27, 2018
    Inventors: David Masayuki Ishikawa, Paul J. Steffas, Ajey M. Joshi
  • Publication number: 20180370131
    Abstract: An additive manufacturing apparatus includes a platform, a dispenser to deliver a plurality of successive layers of feed material on the platform, a light source to generate one or more light beams, a first galvo mirror scanner positioned to direct a first light beam onto a topmost layer of the plurality of successive layers, a second galvo mirror scanner positioned to direct a second light beam onto the topmost layer of the plurality of successive layers, and a controller configured to cause the first galvo mirror scanner to direct the first light beam to pre-heat or heat-treat an area of the topmost layer and to cause the second galvo mirror scanner to direct the second light beam to fuse the area of the topmost layer.
    Type: Application
    Filed: May 29, 2018
    Publication date: December 27, 2018
    Inventors: David Masayuki Ishikawa, Paul J. Steffas, Ajey M. Joshi
  • Publication number: 20180369914
    Abstract: An additive manufacturing system includes a platform, a dispenser to dispense a plurality of layers of feed material on a top surface of the platform, a light source to generate three light beams, a first polygon mirror scanner, a galvo mirror scanner, and a second polygon mirror scanner configured to direct the first, second and third light beams, respectively, to impinge the layer of the feed material on the platform, and a controller. The controller is configured to cause the light source and first and second polygon mirror scanners to apply the first light beam to a region of the layer of feed material, and to cause the light source and galvo mirror scanner to apply the second light beam to at least a portion of the region of the layer of feed material.
    Type: Application
    Filed: April 13, 2018
    Publication date: December 27, 2018
    Inventors: David Masayuki Ishikawa, Paul J. Steffas, Nag B. Patibandla
  • Publication number: 20180264549
    Abstract: An additive manufacturing system includes a platform to support an object to be fabricated, a dispenser to deliver a plurality of layers of a feed material over the platform, a controller configured to store digital data representing a pre-defined pattern, a laser configured to generate a laser beam to impinge an outermost layer of the feed material and coupled to the controller to fuse the feed material in the pre-defined pattern, and a plurality of independently controllable infrared lamps, each infrared lamp directed to a different section of an outermost layer of the feed material.
    Type: Application
    Filed: February 23, 2018
    Publication date: September 20, 2018
    Inventors: David Masayuki Ishikawa, Paul J. Steffas, Brian Hayes Burrows
  • Publication number: 20180264551
    Abstract: An additive manufacturing system includes a platform to support an object to be fabricated, a dispenser to deliver a plurality of layers of a feed material over the platform, a controller configured to store digital data representing a pre-defined pattern, a laser configured to generate a laser beam to impinge an outermost layer of the feed material and coupled to the controller to fuse the feed material in the pre-defined pattern, and a plurality of independently controllable infrared lamps, each infrared lamp directed to a different section of an outermost layer of the feed material.
    Type: Application
    Filed: February 23, 2018
    Publication date: September 20, 2018
    Inventors: David Masayuki Ishikawa, Paul J. Steffas, Brian Hayes Burrows
  • Patent number: 9982364
    Abstract: In some embodiments, an substrate processing system may include a chamber body, a heater assembly disposed within the chamber body, wherein the heater assembly includes a plurality of resistive heater elements coupled together to form an isothermal heated enclosure, and a process kit disposed within the isothermal heated enclosure and having an inner processing volume that includes a plurality of substrate supports to support substrates when disposed thereon, wherein the process kit includes a first processing gas inlet to provide processing gases to the inner processing volume, a first carrier gas inlet to provide a carrier gas to the inner processing volume, and a first exhaust outlet, and a first gas heater coupled via a first conduit to the first carrier gas inlet to heat the carrier gas prior to flowing into the inner processing volume.
    Type: Grant
    Filed: April 7, 2016
    Date of Patent: May 29, 2018
    Assignee: APPLIED MATERIALS, INC.
    Inventors: David Masayuki Ishikawa, Paul J. Steffas, Sumedh Acharya, Brian H. Burrows
  • Publication number: 20160298263
    Abstract: In some embodiments, an substrate processing system may include a chamber body, a heater assembly disposed within the chamber body, wherein the heater assembly includes a plurality of resistive heater elements coupled together to form an isothermal heated enclosure, and a process kit disposed within the isothermal heated enclosure and having an inner processing volume that includes a plurality of substrate supports to support substrates when disposed thereon, wherein the process kit includes a first processing gas inlet to provide processing gases to the inner processing volume, a first carrier gas inlet to provide a carrier gas to the inner processing volume, and a first exhaust outlet, and a first gas heater coupled via a first conduit to the first carrier gas inlet to heat the carrier gas prior to flowing into the inner processing volume.
    Type: Application
    Filed: April 7, 2016
    Publication date: October 13, 2016
    Inventors: DAVID MASAYUKI ISHIKAWA, PAUL J. STEFFAS, SUMEDH ACHARYA, BRIAN H. BURROWS