Abstract: A structure and manufacturing process produce an airbridge for semiconductor devices and circuit applications. Magnesium oxide (MgO) is used to fabricate airbridges. The use of evaporated MgO allows for a thicker and strong airbridge structure, and increases the yield during the singulation of the fabricated devices and circuits. Using MgO as a sacrificial layer provides the flexibility for the sacrificial layer to be removed during the backend process, thereby avoiding any damage in the airbridge structures. In an alternative embodiment, some or all of the MgO can be retained in the airbridge structure, allowing for high density interconnects especially for ground connected interconnects.

Abstract: A method for fabricating an electronic device includes fabricating a plurality of electronic components on a substrate; fabricating a plurality of posts on the plurality of electronic components; depositing filling material between the plurality of posts; and depositing a plurality of top layers, with each top layer disposed on a respective post, thereby fabricating the electronic device. Each top layer is composed of a metal. The step of fabricating the posts includes: fabricating the posts to have identical heights above the substrate. Each post is thermally-conductive, and may be composed of gold. The filling material is composed of MgO, which may be electron beam evaporated to be disposed between the posts. The step of depositing the filling material includes: controlling a thickness of the MgO being deposited by controlling an evaporation rate of the MgO.

Abstract: A protection circuit for a power amplifier connected as a negative feedback loop around the power amplifier. The negative feedback loop comprises a detector circuit, a driver circuit and an attenuator circuit. The detector circuit receives output voltage from the power amplifier and generates a signal when the output voltage exceeds a predefined threshold. The driver circuit filters the signal received from the detector circuit to maintain feedback loop stability and adjusts the feedback loop bandwidth and gain to provide a filtered signal. The attenuator circuit receives the filtered signal and attenuates the input voltage of the power amplifier to reduce the output voltage of the power amplifier to a level below the predefined threshold.