Abstract: The present invention comprises a chemical mechanical polishing tool comprising a polishing platen and a removable, replaceable platen top mounted on a top surface of the platen. Preferably, the platen top comprises a material substantially impervious to the slurries used when planarizing an object. Most preferably, the platen top comprises aluminum alloy or glass. The platen top may be tailored to provide enhanced polishing conditions by acting as an insulator, a conductor or machined to be concave or convex. The invention may further include endpoint sensors attached to the platen top.

Abstract: The present invention comprises a chemical mechanical polishing tool comprising a polishing platen and a removable, replaceable platen top mounted on a top surface of the platen. Preferably, the platen top comprises a material substantially impervious to the slurries used when planarizing an object. Most preferably, the platen top comprises aluminum alloy or glass. The platen top may be tailored to provide enhanced polishing conditions by acting as an insulator, a conductor or machined to be concave or convex. The invention may further include endpoint sensors attached to the platen top.

Abstract: A method of using a recyclable abrasive blasting system for blasting abrasive against a surface to be cleaned and for recovering such abrasive, comprising a storage hopper for containing abrasive, blast pots which receive abrasive and deliver it to a blasting hose, an autodump tank including an inlet for receiving particles resulting from blasting, such particles comprising trash, debris, dust and abrasive, a screen for separating trash and debris from the particles, an airwash for separating dust from said particles, and values for metering the amount of particles traveling there-through, a classifier includes a first auger and a plurality of augers formed by screens having spiral members thereon, the plurality of augers surrounding the first auger and in rotating cooperation therewith, whereby the screens classify debris from abrasive such that it may be routed outside of the classifier, whereby an airwash takes place and wherein any remaining particles travel to a particle separator having accumulating pla

Abstract: A recyclable abrasive blasting system for blasting abrasive against a surface to be cleaned and for recovering such abrasive which has been blasted, comprising a storage hopper for containing abrasive, blast pots which receive abrasive and deliver it to a blasting hose wherein abrasive is propelled against a surface, an autodump tank including an inlet for receiving particles resulting from blasting, such particles comprising trash, debris, dust and abrasive, a screen for separating trash and debris from the particles, an airwash for separating dust from said particles, and valves for metering the amount of particles traveling therethrough, a classifier includes a first auger and a plurality of augers formed by screens having spiral members thereon, the plurality of augers surrounding the first auger and in rotating cooperation therewith, whereby the screens classify debris from abrasive such that it may be routed outside of the classifier, whereby an airwash takes place and wherein any remaining particles tr