Abstract: The present application provides a method and system for automated inspection of a microfabricated feature on a substrate. The disclosure utilizes manipulating laser polarization in combination with the excitation and emission process, in inspection applications. The application specifically discloses selecting the polarization of the laser light by adjusting a polarization manipulator or a quarter-waveplate and/or a half waveplate between the laser source and the substrate to impart polarization to the laser light. The polarization impacts using a polarization selected to improve fluorescence emission of certain features on a substrate. The selection can be made prior to run time or dynamically during the inspection tool runtime. If the polarization is not specifically selected, then the microfabricated features may not emit much fluorescence.

Abstract: An optical metrology device simultaneously performs confocal and non-confocal Raman spectroscopy. The optical metrology device includes a double-clad fiber with a core that acts as a confocal pinhole to receive the confocal signal from the Raman response while simultaneously receiving the non-confocal signal from the Raman response over the inner cladding and core of the double-clad fiber. A spectrometer receives the Raman response via the double-clad fiber to detect the confocal spectroscopic signal from the core and to detect the non-confocal spectroscopic signal from the inner cladding and the core.

Abstract: A method includes determining a set of candidate beam directions. The radiation therapy method further includes selecting a sub-set of non-coplanar beam directions of interest from the set of candidate beam directions based on a fluence optimization using a beam angle selection algorithm. The radiation therapy method further includes determining a set of delivery options based on a beam trajectory algorithm, wherein the delivery options at least include a non-coplanar trajectory during radiation treatment delivery. The radiation therapy method further includes optimizing the delivery options to generate a VMAT radiation plan with non-coplanar beam trajectories. The optimizing of the delivery options includes optimizing at least one machine parameter.