Patents by Inventor David Paul Jensen

David Paul Jensen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer level centrifuge for MEMS stiction detection and screening system and method
    Patent number: 9651473
    Abstract: A wafer level centrifuge (WLC) system and method of testing MEMS devices using the system. The wafer level centrifuge (WLC) system can include a base centrifuge system and a cassette mounting hub coupled to the base centrifuge system. The method can include applying a smooth and continuous acceleration profile to two or more MEMS wafers via the base centrifuge system. Each of the two or more MEMS wafers can have one or more MEMS devices formed thereon. The two or more MEMS wafers can be provided in two or more wafer holding cassettes configured on the cassette mounting hub. The method can also include identifying one or more target MEMS wafers, which can include identifying stiction in one or more MEMS devices on the one or more MEMS wafers.
    Type: Grant
    Filed: March 21, 2014
    Date of Patent: May 16, 2017
    Assignee: mCube Inc.
    Inventors: Raymond Merrill, Jr., David Paul Jensen
  • WAFER LEVEL CENTRIFUGE FOR MEMS STICTION DETECTION AND SCREENING SYSTEM AND METHOD
    Publication number: 20140290331
    Abstract: A wafer level centrifuge (WLC) system and method of testing MEMS devices using the system. The wafer level centrifuge (WLC) system can include a base centrifuge system and a cassette mounting hub coupled to the base centrifuge system. The method can include applying a smooth and continuous acceleration profile to two or more MEMS wafers via the base centrifuge system. Each of the two or more MEMS wafers can have one or more MEMS devices formed thereon. The two or more MEMS wafers can be provided in two or more wafer holding cassettes configured on the cassette mounting hub. The method can also include identifying one or more target MEMS wafers, which can include identifying stiction in one or more MEMS devices on the one or more MEMS wafers.
    Type: Application
    Filed: March 21, 2014
    Publication date: October 2, 2014
    Applicant: mCube Inc.
    Inventors: Raymond Merrill, JR., David Paul Jensen