Abstract: The disclosure relates to a damping arrangement for vibration damping of an element in an optical system, for example in a microlithographic projection exposure apparatus. A damping arrangement according to the disclosure has an element, a fluid located in a cavity, and at least one channel connected to the cavity. A vibration of the element causes vibration energy of the element to be dissipated by partial displacement of the fluid from the cavity into the at least one channel.

Abstract: A system for exchanging data between control or evaluation apparatuses and data- producing devices, such as tools, testing installations, calibrating installations or appliances for automatic identification is proposed, wherein the system comprises a control or evaluation apparatus and at least one network-capable module which can be connected or is connected to a data-producing device, wherein the control or evaluation apparatus and the network-capable module are designed to exchange data via a wireless data link, wherein, in a first operating mode, a communication protocol provided for exchanging data between the control or evaluation apparatus and the data-producing device is tunneled via the wireless data link.