Abstract: One embodiment disclosed relates to a method for adaptive bipolar operation of a micro electromechanical (MEM) device. The method includes driving the MEM device in a first polarity, determining when an offset passes a first threshold, and switching from the first polarity to a second polarity when the offset passes the first threshold. Another embodiment disclosed relates to an apparatus for adaptive bipolar operation of a MEM device. The apparatus includes a first look-up table (LUT) for use in driving the MEM device in a first polarity, a circuit for determining when an offset passes a first threshold, and a polarity switch for switching from the first polarity to a second polarity when the offset passes the first threshold.

Abstract: An apparatus having an improved, tunable gamma response is disclosed. The apparatus comprises a light modulator having a plurality of spaced-apart elements, composed of alternating active elements and passive elements lying in a single plane; a gamma controller; and a displacement controller. The gamma controller applies a gamma voltage to a substrate, displacing the plurality of spaced-apart elements to a bias plane, closer to the substrate. In a reflection mode, the plurality of spaced-apart elements function as a spectral mirror to an impinging light beam. In a diffraction mode, the displacement controller applies a displacement voltage to the active elements. The active elements are now moved to a second plane parallel to the bias plane so that the light beam impinging on the light modulator will be diffracted. The illumination intensity of a detected light signal is proportional to the displacement voltage raised to a power of between approximately 1.75 and 3.0, the gamma response.

Abstract: The current invention is directed to optical MEM devices and methods for making the same. MEM devices, in accordance with the current invention, have one or more movable micro-structures which are preferably ribbon structures or cantilever structures configured for modulating light. The movable micro-structures are patterned from a device layer comprising a silicon nitride under-layer, a reflective metal top-layer and a ceramic compensating layer. The ceramic compensating layer is provided. to reduce stress in the micro-structures which can lead to curvature. In accordance with the embodiments of the invention, the device layer is formed on a silicon substrate that is preferably etched with trenches before forming the device layer. The device layer is then patterned using lithographic masking and etching techniques to release the patterned device layer and form the movable micro-structures. Portions of the device layer which are formed over the trenches provide support for the released patterned device layer.

Abstract: A display apparatus projects a two dimensional image onto a display screen and includes illumination optics, a light modulator, separating optics and scanning optics. The light modulator is optically coupled to the illumination optics such that in operation the illumination optics illuminate the light modulator with an off-axis illumination and further such that the light modulator directs light onto an optic axis for a bright pixel, thereby forming on-axis light, and away from the optic axis for a dark pixel, thereby forming off-axis light. The separating optics are coupled to the light modulator and separate the off-axis and on-axis light where the on-axis light produces a real and virtual image that is displayed by the projection and scanning optics.

Abstract: A MEM device in accordance with the invention comprises one or more movable micro-structures which are preferably ribbon structures or cantilever structures. The ribbon structures or cantilever structures are preferably coupled to a substrate structure through one or more support regions comprising a plurality of anchor support features and a plurality of post support features. The MEM device is preferably an optical MEM device with a plurality of movable ribbon structures each being supported by opposing ends through support regions each comprising a plurality of anchor support features and a plurality of post support features. In accordance with the method of the embodiments, the positions of the anchor and post support features, the number of anchor and support features and the spacings between the support features can selected during fabrication of the device to determine an operating condition of the MEM device.

Abstract: A light modulator includes elongated elements arranged parallel to each other. In a first diffraction mode, the light modulator operates to diffract an incident light into at least two diffraction orders. In a second diffraction mode, the light modulator operates to diffract the incident light into a single diffraction order. Each of the elongated elements comprises a blaze profile, which preferably comprises a reflective stepped profile across a width of each of the elongated elements and which produces an effective blaze at a blaze angle. Alternatively, the blaze profile comprises a reflective surface angled at the blaze angle. Each of selected ones of the elongated elements comprise a first conductive element. The elongated elements produce the first diffraction when a first electrical bias is applied between the first conductive elements and a substrate.

Abstract: A structure of a hybrid MEMS structure is provided wherein a plate comprises a thin actuatable layer of conductive silicon, such as a MEMS actuatable element, and a thicker handle layer of conductive silicon to provide structural integrity which are separated by a thin oxide, together forming an SOI wafer. This plate is mounted to a substrate, typically ceramic, with the thin actuatable layer facing the substrate and separated by an air gap that is formed by creating, on the substrate, insulator standoffs which come in contact with the plate. A suitable dielectric material useful as a standoff on the substrate is a footrest that permits high aspect ratios.

Abstract: A light modulator includes elongated elements arranged parallel to each other and suspended above a substrate. The light modulator operates in a first diffraction mode and in a second diffraction mode. In the first diffraction mode, an incident light diffracts into a single diffraction order. Each of the elongated elements comprises a central blazed portion, a first outer blaze transition, and a second outer blaze transition. The central blaze portion, couples the first outer blaze transition to the second outer blaze transition. Each of the central blazed portions comprises a reflective surface. Selected ones of the central blazed portions comprise a first conductive element. The first outer blaze transition and the second outer blaze transition are coupled to the substrate.

Abstract: In an array apparatus, each MEMS element, comprising an actuatable element and a supportive handle, is mounted over a plurality of electrodes wherein the air gap is controlled by the thickness of the electrodes and not primarily by the structure of the handle. The structure of electrostatic actuation electrodes in specific embodiments is disclosed. While the invention is primarily a technique for reducing the air gap without unduly limiting the thickness of the handle, the invention may also be used to establish an air gap greater than the thickness of the handle.

Abstract: A display apparatus projects an image onto a display screen and includes a grating light valve, a focusing arrangement and a scanning device. The grating light valve is located near but not at a focal plane of a line illumination such that in operation the grating light valve produces real or virtual two dimensional images. The grating light valve is configured such that the modular members on the surface of the grating light valve are neither parallel nor perpendicular to the effective pixel are, thereby arranged diagonally across the pixel area in order to eliminate any imperfections or defects in the line illumination. A seal glass is coupled with the grating light valve and forms an air gap between itself and the grating light valve such that the line illumination must pass through the seal glass and the air gap before reaching the grating light valve.

Abstract: A light modulator includes elongated elements arranged parallel to each other and suspended above a substrate. The light modulator operates in a first diffraction mode and in a second diffraction mode. In the first diffraction mode, an incident light diffracts into at least two diffraction orders. In the second diffraction mode, the incident light diffracts into a single diffraction order. Each of the elongated elements comprises a central blazed portion, a first outer blaze transition, and a second outer blaze transition. The central blaze portion couples the first outer blaze transition to the second outer blaze transition. Each of the central blazed portions comprises a reflective surface. Selected ones of the central blazed portions comprise a first conductive element. The first outer blaze transition and the second outer blaze transition are coupled to the substrate. The substrate comprises a second conductive element.

Abstract: A light modulator includes elongated elements arranged parallel to each other. In a first diffraction mode, the light modulator operates to diffract an incident light into at least two diffraction orders. In a second diffraction mode, the light modulator operates to diffract the incident light into a single diffraction order. Each of the elongated elements comprises a blaze profile, which preferably comprises a reflective stepped profile across a width of each of the elongated elements and which produces an effective blaze at a blaze angle. Alternatively, the blaze profile comprises a reflective surface angled at the blaze angle. Each of selected ones of the elongated elements comprise a first conductive element. The elongated elements produce the first diffraction when a first electrical bias is applied between the first conductive elements and a substrate.

Abstract: An array apparatus has a micromachined SOI structure, such as a MEMS array, mounted directly on a class of substrate, such as low temperature co-fired ceramic, in which is embedded electrostatic actuation electrodes disposed in substantial alignment with the individual MEMS elements, where the electrostatic electrodes are configured for substantial fanout and the electrodes are oversized such that in combination with the ceramic assembly are configured to allow for placement of the vias within a tolerance of position relative to electrodes such that contact is not lost therebetween at the time of manufacturing.

Abstract: An array apparatus has a micromachined SOI structure, such as a MEMS array, mounted directly on a class of substrate, such as low temperature co-fired ceramic, in which is embedded electrostatic actuation electrodes disposed in substantial alignment with the individual MEMS elements, where the electrostatic electrodes are configured for substantial fanout and the electrodes are oversized such that in combination with the ceramic assembly are configured to allow for placement of the vias within a tolerance of position relative to electrodes such that contact is not lost therebetween at the time of manufacturing.

Abstract: A display apparatus projects a two dimensional image onto a display screen and includes illumination optics, a light modulator, separating optics and scanning optics. The light modulator is optically coupled to the illumination optics such that in operation the illumination optics illuminate the light modulator with an off-axis illumination and further such that the light modulator directs light onto an optic axis for a bright pixel, thereby forming on-axis light, and away from the optic axis for a dark pixel, thereby forming off-axis light. The separating optics are coupled to the light modulator and separate the off-axis and on-axis light where the on-axis light produces a real and virtual image that is displayed by the projection and scanning optics.

Abstract: A display apparatus projects an image onto a display screen and includes a grating light valve, a focusing arrangement and a scanning device. The grating light valve is located near but not at a focal plane of a line illumination such that in operation the grating light valve produces real or virtual two dimensional images. The grating light valve is configured such that the modular members on the surface of the grating light valve are neither parallel nor perpendicular to the effective pixel are, thereby arranged diagonally across the pixel area in order to eliminate any imperfections or defects in the line illumination. A seal glass is coupled with the grating light valve and forms an air gap between itself and the grating light valve such that the line illumination must pass through the seal glass and the air gap before reaching the grating light valve.