Patents by Inventor David T Dutton

David T Dutton has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Three dimensional etching process
    Patent number: 6682657
    Abstract: A method of forming three-dimensional structures on a substrate by a single reactive ion each run whereby a mask is formed on said substrate before a series of iterations are carried out, each iteration including a mask etch and a substrate etch, so that successive iterations give life to reduction in the mask area and exposure of further areas of substrate.
    Type: Grant
    Filed: July 7, 1998
    Date of Patent: January 27, 2004
    Assignee: Qinetiq Limited
    Inventors: David T Dutton, Anthony B Dean
  • THREE DIMENSIONAL ETCHING PROCESS
    Publication number: 20030057177
    Abstract: A method of forming three-dimensional structures on a substrate by a single reactive ion each run whereby a mask is formed on said substrate before a series of iterations are carried out, each iteration including a mask etch and a substrate etch, so that successive iterations give life to reduction in the mask area and exposure of further areas of substrate.
    Type: Application
    Filed: July 7, 1998
    Publication date: March 27, 2003
    Inventors: DAVID T DUTTON, ANTHONY B DEAN