Abstract: An overlay target for use in imaging based metrology is disclosed. The overlay target includes a plurality of target structures including three or more target structures, each target structure including a set of two or more pattern elements, wherein the target structures are configured to provide metrology information pertaining to different pitches, different coverage ratios, and linearity. Pattern elements may be separated from adjacent pattern elements by non-uniform distance; pattern elements may have non-uniform width; or pattern elements may be designed to demonstrate a specific offset as compared to pattern elements in a different layer.

Abstract: Antimicrobial lubricant compositions are disclosed. The antimicrobial lubricant compositions are particularly useful in providing antimicrobial capability to a wide-range of medical devices. The compositions include an oil lubricant. Representative lubricants may include polydimethyl siloxane, trifluoropropyl copolymer polysiloxane, and a copolymer of dimethylsiloxane and trifluoropropylmethylsiloxane. The compositions include rheology modifiers as necessary. The compositions also include antimicrobial agents, which may be selected from a wide array of agents. Representative antimicrobial agents include of aldehydes, anilides, biguanides, bis-phenols, quaternary ammonium compounds, cetyl pyridium chloride, cetrimide, alexidine, chlorhexidine diacetate, benzalkonium chloride, and o-phthalaldehyde.

Abstract: The invention may be embodied in a system and method for monitoring and controlling feedback control in a manufacturing process, such as an integrated circuit fabrication process. The process control parameters may include translation, rotation, magnification, dose and focus applied by a photolithographic scanner or stepper operating on silicon wafers. Overlay errors are used to compute measured parameters used in the feedback control process. Statistical parameters are computed, normalized and graphed on a common set of axes for at-a-glance comparison of measured parameters and process control parameters to facilitate the detection of problematic parameters. Parameter trends and context relaxation scenarios are also compared graphically. Feedback control parameters, such as EWMA lambdas, may be determined and used as feedback parameters for refining the APC model that computes adjustments to the process control parameters based on the measured parameters.

Abstract: A method for automatic process control (APC) performance monitoring may include, but is not limited to: computing one or more APC performance indicators for one or more production lots of semiconductor devices; and displaying a mapping of the one or more APC performance indicators to the one or more production lots of semiconductor devices.

Abstract: Antimicrobial compositions and methods are disclosed. The antimicrobial compositions are particularly useful in providing antimicrobial capability to a wide-range of medical devices. In one aspect, the invention relates to a mild solvent coating using acrylate-type mild solution coating. These compositions include rheological modifiers as necessary. The compositions also include antimicrobial agents, which may be selected from a wide array of agents. Representative antimicrobial agents include cetyl pyridium chloride, cetrimide, alexidine, chlorexidine diacetate, benzalkonium chloride, and o-phthalaldehyde. Additionally, the compositions comprise one or more suitable mild solvents, such as a low molecular weight alcohol, alkane, ketone, and combinations thereof.

Abstract: Antimicrobial lubricant compositions are disclosed. The antimicrobial lubricant compositions are particularly useful in providing antimicrobial capability to a wide-range of medical devices. The compositions include an oil lubricant. Representative lubricants may include polydimethyl siloxane, trifluoropropyl copolymer polysiloxane, and a copolymer of dimethylsiloxane and trifluoropropylmethylsiloxane. The compositions include rheology modifiers as necessary. The compositions also include antimicrobial agents, which may be selected from a wide array of agents. Representative antimicrobial agents include of aldehydes, anilides, biguanides, bis-phenols, quaternary ammonium compounds, cetyl pyridium chloride, cetrimide, alexidine, chlorhexidine diacetate, benzalkonium chloride, and o-phthalaldehyde.

Abstract: Antimicrobial compositions and methods are disclosed. The antimicrobial compositions are particularly useful in providing antimicrobial capability to a wide-range of medical devices. In one aspect the invention relates a UV curable antimicrobial coating comprising a UV curable composition comprising an oligomer, a momoner, and a photoinitiator which are together capable of forming a UV curable polymer composition. The compositions include rheology modifiers as necessary. The compositions also include antimicrobial agents, which may be selected from a wide array of agents. Representative antimicrobial agents include cetyl pyridium chloride, cetrimide, alexidine, chlorexidine diacetate, benzalkonium chloride, and o-phthalaldehyde.

Abstract: Packets received over a network are routed using a packet engine of the invention based on information contained in layer 4 or above. The information for switching is contained in the header information of the packet. Based on this higher level information, the packet engine may drop the packet, redirect the packet, load balance the packet, perform bandwidth provisioning (e.g., limit the speed of a connection), or adjust quality of service (e.g., change priority or rearrange a queue of packets to be handled), or combinations of these.

Abstract: A pressing device for thin-film circuits and terminals includes the characteristics of a machine base provided with a bottom panel, and a cutting block and a pressing block capable of intermittent up-and-down displacement at an interior thereof; an inner modular base capable of elastic displacement and flexibly disposed in a projecting column on the bottom panel; and an outer modular base fixed at an outer side of the inner modular base. Wherein, the outer modular base presses onto an upper pressing plane using downward displacement of the pressing block, and a cutting-edge portion slides upward along a rear sliding wall of the inner modular base, thereby accurately puncturing, stamping and connecting a plurality of terminals onto silvered wires of a thin-film circuit at a time.

Abstract: A pressing device for thin-film circuits and terminals includes the characteristics of a machine base provided with a bottom panel, and a cutting block and a pressing block capable of intermittent up-and-down displacement at an interior thereof; an inner modular base capable of elastic displacement and flexibly disposed in a projecting column on the bottom panel; and an outer modular base fixed at an outer side of the inner modular base. Wherein, the outer modular base presses onto an upper pressing plane using downward displacement of the pressing block, and a cutting-edge portion slides upward along a rear sliding wall of the inner modular base, thereby accurately puncturing, stamping and connecting a plurality of terminals onto silvered wires of a thin-film circuit at a time.