Abstract: A handpiece for use in delivering the output beam of a laser to the surface of a patient's skin for performing a dermatological procedure. In a first and second embodiment of the present invention, the handpiece provides a highly collimated beam of a fixed, non-variable spot size which is largely insensitive to movement of the handpiece over a range of working positions. In a third embodiment the handpiece provides a highly collimated and well defined focused laser spot of variable size where for a selected spot size, the size is largely insensitive to movement of the handpiece over a range of working positions. In all of the embodiments, the highly collimated laser beam permits the surgeon performing the procedure to move the handpiece over a range of positions without significantly defocusing or altering the spot size of the beam.

Abstract: A waveguide including a folded, coated reflector highly reflective of radiation having two different wavelengths over a wide range of incidence angles, including grazing incidence angles. The waveguide can be employed for guiding laser radiation useful for medical or other applications, such as a combined HeNe and CO.sub.2 laser beam. In some embodiments, the invention is a hollow waveguide formed by folding a flat, coated substrate into a polygonal shape. Because the coated substrate is folded, rather than rolled into a cylindrical tube, the bending stress on the coating is concentrated at the corners of the polygonal waveguide rather than distributed over the waveguide's entire surface. Although the coating may crack at the corners of the waveguide's polygonal cross-section, the flat surfaces between the waveguide edges will be intact, and the cracks in the corners will have an insignificant effect on waveguide performance.

Abstract: A pulsed solid state laser system is disclosed which utilizes a plurality of individual laser rods which are sequentially pumped and whose beans are combined into a single interleaved output bean. The individual laser rods are pumped at an average power level which is below that for maximum output power from each rod, thereby obviating the need for refrigeration cooling. A compact optical system is disclosed which permits a constant beam size even at different pump levels and other advantages. A compact cooling system is also disclosed.

Abstract: A dichroic optical filter including a substrate that is substantially transparent to visible radiation, and an oxide semiconductor layer on the substrate for reflecting an infrared wavelength (such as an infrared treatment beam wavelength). An example of a suitable oxide semiconductor for reflecting a treatment beam from a CO.sub.2 layer is indium tin oxide. Preferably, the filter includes a specially designed multilayer coating on the oxide semiconductor layer to enhance the reflection of infrared and longer wavelength radiation. This multilayer coating includes alternating quarter-wave layers of high and low refractive index materials, each having an optical thickness substantially equal to a quarter-wavelength of infrared radiation to be reflected.

Abstract: A coated reflector reflective of radiation having two different wavelengths over a wide range of incidence angles, including grazing incidence angles. The coated reflector can be employed in a waveguide for laser radiation useful for medical or other applications, such as a combined HeNe and CO.sub.2 laser beam. Preferably, the coated reflector includes a metal substrate and a multi-layer stack thereon, the multi-layer stack consists of alternating dielectric layers of high and low refractive index material, each pair of adjacent high and low index layers of the stack has a combined matched optical thickness substantially equal to an incident short (e.g., visible) wavelength multiplied by a factor M/2, and the total matched optical thickness of the stack is substantially equal to (2N-1).lambda..sub.L /8, where M and N are positive integers and .lambda..sub.L is an incident long wavelength (such as the wavelength of a CO.sub.2 laser beam).

Abstract: A pulse format for a laser system is disclosed for maximizing the energy delivered to a target immersed in an absorbing liquid. A first pulse is generated having an energy sufficient to initiate the formation of a vapor bubble in the liquid medium adjacent the end of the delivery device. A second, high energy pulse is generated after the vapor bubble initiated by the first pulse has expanded an amount sufficient to displace the liquid between the delivery device and the target. In this manner, the second pulse is delivered directly to the target and little energy is lost to the liquid medium.

Abstract: A beam delivery apparatus, including a set of focusing mirrors (or transmissive lenses) mounted along an endoscope channel. A laser beam can be focused into an input end of the channel with a smaller F number (wider cone angle) than is possible in a conventional endoscope. As the beam propagates down the channel, it is reflected (or transmitted) a finite number of times by the focusing elements. The focusing elements act as a periscope to focus and refocus the beam as it propagates along the channel, with little loss of beam power. The invention enables delivery of the beam to the channel's distal end with a smaller F number than can be achieved using a conventional endoscope. In a preferred embodiment, a pair of reflecting strips are mounted the channel, the surface of each strip defines six focusing mirrors, and the beam undergoes a total of twelve reflections from the mirrors as it propagates down the channel.

Abstract: An improved apparatus for manually manipulating a surgical laser beam is disclosed. The preferred embodiment of the invention includes a mirror nominally positioned at a 45 degree angle to the incident laser beam, a joy stick for manipulating the mirror, and a linkage interconnecting the two. The mirror is mounted to allow it to rotate about two mutually perpendicular and intersecting axes. The linkage operates to direct the reflected laser beam in two orthogonal dimensions such that a ratio between the movement of the reflected beam in each dimension is equivalent to the ratio of the movement of the joy stick in each dimension. This yields a reflected laser beam that moves a distance proportional to the amount of motion input to the joy stick. The reduction or amplification ratio between the input motion and the reflected laser beam motion remains constant, regardless of the direction of motion.

Abstract: A dichroic optical filter including a substrate that is substantially transparent to visible radiation, and an oxide semiconductor layer on the substrate for reflecting an infrared wavelength (such as an infrared treatment beam wavelength). An example of a suitable oxide semiconductor for reflecting a treatment beam from a CO.sub.2 layer is indium tin oxide. Preferably, the filter includes a specially designed multilayer coating on the oxide semiconductor layer to enhance the reflection of infrared and longer wavelength radiation. This multilayer coating includes alternating quarter-wave layers of high and low refractive index materials, each having an optical thickness substantially equal to a quarter-wavelength of infrared radiation to be reflected.

Abstract: An improved apparatus for manually manipulating a surgical laser beam is disclosed. The preferred embodiment of the invention includes a mirror nominally positioned at a 45 degree angle to the incident laser beam, a joy stick for manipulating the mirror, and a linkage interconnecting the two. The mirror is mounted to allow it to rotate about two mutually perpendicular and intersecting axes. The linkage operates to direct the reflected laser beam in two orthogonal dimensions such that a ratio between the movement of the reflected beam in each dimension is equivalent to the ratio of the movement of the joy stick in each dimension. This yields a reflected laser beam that moves a distance proportional to the amount of motion input to the joy stick. The reduction or amplification ratio between the input motion and the reflected laser beam motion remains constant, regardless of the direction of motion.

Abstract: This invention is directed to electromagnetic alignment apparatus, which is particularly adapted, among other possible uses, for use in aligning the wafers in a microlithography system, said apparatus comprising in combination a first magnetic circuit having a plurality of elements including a first magnet; a second magnetic circuit having a plurality of elements including a second magnet; the second magnetic circuit being disposed in spaced relationship with respect to the first magnetic circuit; a movable structural component adapted for mounting an object thereon; one element of each magnetic circuit being fixedly attached to the movable structural component; first and second current carrying coil assemblies mounted in the first magnetic circuit; the second coil assembly being disposed at an angle with respect to the first coil assembly; third and fourth current carrying coil assemblies mounted in the second magnetic circuit; the fourth coil assembly being disposed at an angle with respect to the third coi

Abstract: This invention is directed to electromagnetic alignment apparatus, which is particularly adapted, among many other possible uses, for use in aligning the wafers in a microlithography system, said apparatus comprising in combination three or more spaced magnets, three or more coil assemblies mounted to pass through the magnetic fields of the magnets respectively, means for controlling the flow of current through the coil assemblies respectively, said coil assemblies being joined together to form a structure movable with respect to the magnets and adapted to carry an object thereon, the coil assemblies being wound with respect to each other so that by controlling the supply of current to the coils the structure can be moved selectively in three degrees of freedom.

Abstract: An apparatus automatically for correcting tilt and focus errors of a wafer in a mask projection system for a plurality of subfields on the wafer which vary in position according to a known scheme. The tilt and focus of each subfield on the wafer is individually corrected by three axial actuators operating on the variable X and Y coordinates of the center of each subfield and its tilt and focus errors.

Abstract: This invention is directed to electro-magnetic alignment devices, which are particularly adapted, among other possible uses, for use in aligning the wafers in a microlithography system, said devices comprising in combination a base plate, a first current carrying coil assembly mounted on the base plate, a second current carrying coil assembly mounted on the base plate in spaced relationship with respect to the first coil assembly, a first magnet mounted adjacent the first coil assembly and a second magnet mounted adjacent the second coil assembly, an upper connecting piece connecting the first and second magnets, a mount for receiving an object on the upper connecting piece, the base plate and magnets and upper connecting piece coacting to form a magnetic circuit, a controller for controlling the flow and direction of current through the coil assemblies to move the magnets and upper connecting piece with respect to the base plate, a plurality of linear actuators mounted between the magnets and the upper conne