Abstract: A confocal three dimensional inspection system, and process for use thereof, allows for rapid inspecting of bumps and other three dimensional (3D) features on wafers, other semiconductor substrates and other large format micro topographies. The sensor eliminates out of focus light using a confocal principal to create a narrow depth response in the micron range.

Abstract: A confocal three dimensional inspection system, and process for use thereof, allows for rapid inspecting of bumps and other three dimensional (3D) features on wafers, other semiconductor substrates and other large format micro topographies. The sensor eliminates out of focus light using a confocal principal to create a narrow depth response in the micron range.

Abstract: A confocal three dimensional inspection system, and process for use thereof, allows for rapid inspecting of bumps and other three dimensional (3D) features on wafers, other semiconductor substrates and other large format micro topographies. The sensor eliminates out of focus light using a confocal principal to create a narrow depth response in the micron range.

Abstract: A confocal three dimensional inspection system, and process for use thereof, allows for inspecting of bumps and other three dimensional (3D) features on wafers and other semiconductor substrates. The sensor eliminates out of focus light using a confocal principal to improve depth response.

Abstract: A confocal three dimensional inspection system, and process for use thereof, allows for inspecting of bumps and other three dimensional (3D) features on wafers and other semiconductor substrates. The sensor eliminates out of focus light using a confocal principal to improve depth response.

Abstract: An optical lens system includes a multi-element lens designed to maximize light collection efficiency and transmission but accepting a sufficiently high level of distortion to forego the system from imaging light patterns at each of a set of wavelengths at which the patterns are being emitted from a planar source simultaneously. The system also illustratively includes a cooled CCD camera with a dewar and filter assembly which is movable along the optic axis of the system to specified positions for selecting a particular wavelength at which an image is in focus so that the light pattern (image) at each different wavelength can be captured at a different time. A CCD camera is used to capture the image and the camera controller includes software to reduce the amount of distortion introduced by the lens.