Abstract: A moveable micromirror includes a supporting structure, a flexible post extending from the supporting structure, and a table extending radially from the end of the post along a plane generally perpendicular to the post, the table having a reflective surface facing away from the supporting structure. The post, preferably formed of single-crystal silicon, is dimensioned to be sufficiently flexible to allow the reflective surface to be selectively moveable and positionable, with at least two degrees of freedom, when urged by a suitable actuating force. A method of making an array of moveable micromirrors of this type includes deep etching a silicon substrate so as to form posts surrounded by trenches, etching back the surface of the substrate around the posts so as to allow the posts to protrude beyond the surface of the substrate, and affixing a table with a reflective surface thereon to the tops of a plurality of the posts.

Abstract: A micro-electro-mechanical system (MEMS) optical switch actuator and method for fabricating the actuator provide an anchor assembly that functions as a second electrode. The actuator has a reflective element assembly and a first electrode assembly for moving the reflective element assembly from a first position to a second position based on a switching signal. The actuator further includes an anchor assembly coupled to the reflective element assembly such that a spring force is generated in the reflective element assembly when the reflective element assembly is in the second position. The anchor assembly is electrically conductive such that the switching signal generates an electrostatic force between the anchor assembly and the first electrode assembly. The method for fabricating the actuator includes the step of coupling a multi-level reflection assembly to an optical circuit.

Abstract: A micro-electro-mechanical system (MEMS) optical switch actuator and method for fabricating the actuator provide an anchor assembly that functions as a second electrode. The actuator has a reflective element assembly and a first electrode assembly for moving the reflective element assembly from a first position to a second position based on a switching signal. The actuator further includes an anchor assembly coupled to the reflective element assembly such that a spring force is generated in the reflective element assembly when the reflective element assembly is in the second position. The anchor assembly is electrically conductive such that the switching signal generates an electrostatic force between the anchor assembly and the first electrode assembly. The method for fabricating the actuator includes the step of coupling a multi-level reflection assembly to an optical circuit.

Abstract: A moveable micromirror includes a supporting structure, a flexible post extending from the supporting structure, and a table extending radially from the end of the post along a plane generally perpendicular to the post, the table having a reflective surface facing away from the supporting structure. The post, preferably formed of single-crystal silicon, is dimensioned to be sufficiently flexible to allow the reflective surface to be selectively moveable and positionable, with at least two degrees of freedom, when urged by a suitable actuating force. A method of making an array of moveable micromirrors of this type includes deep etching a silicon substrate so as to form posts surrounded by trenches, etching back the surface of the substrate around the posts so as to allow the posts to protrude beyond the surface of the substrate, and affixing a table with a reflective surface thereon to the tops of a plurality of the posts.

Abstract: Extrusion die apparatus and an extrusion method for extruding large-cross-section honeycomb structures from plasticized ceramic batch materials are described, the apparatus comprising a die having a support rod connected to its central portion, the support rod being anchored to support means upstream of the die. The support rod and support means act to limit die distortion during extrusion, reducing die strain and stress to levels permitting large honeycomb extrusion without die failure. Dies of optimal thickness are disclosed which reduce the maximum stresses exerted on the die during extrusion.

Abstract: A self-cleaning spray nozzle and header system sprays liquid upon a predetermined area. As the liquids employed in such spraying operations are often contaminated by suspended particulate matter, blockages of the small nozzle orifice often occur. To clear such blockages and restore the nozzle to operation, a grooved piston forming part of the nozzle orifice is retracted from its seated position within the nozzle barrel. Once the piston is retracted, the barrel opens to its full diameter allowing lodged particles to be flushed away. Several nozzles mounted in tandem upon a fluid distribution pipe form part of a header system which can deliver, in the form of spray, large liquid volumes. The header system allows the self-cleaning function of several nozzles to be efficiently controlled by a single apparatus.