Patents by Inventor David Wesley Manley

David Wesley Manley has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240152063
    Abstract: Systems for maintaining light sources for semiconductor photolithography in which a module making up part of the light source is evaluated at various pulse counts to produce a binary prediction as to whether the module is sufficiently likely to operate without failure in an ensuing sequence of pulses. The binary prediction may be made by a machine learning model trained on metrics extracted from measurements taken on deinstalled modules. A group of models, each trained differently, can be made available according to a selection made by the user or according to the maintenance objectives of the user.
    Type: Application
    Filed: February 24, 2022
    Publication date: May 9, 2024
    Inventors: Russell Allen Burdt, Kumar Raja Guvindan Raju, Matthew Minakais, David Wesley Manley