Patents by Inventor David William Callan

David William Callan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus and device manufacturing method
    Patent number: 7714305
    Abstract: Apparatus and methods for compensating for the movement of a substrate in a lithographic apparatus during a pulse of radiation include providing a pivotable mirror configured to move a patterned radiation beam incident on the substrate in substantial synchronism with the substrate.
    Type: Grant
    Filed: March 9, 2006
    Date of Patent: May 11, 2010
    Assignees: ASML Holding N.V., ASML Netherlands B.V.
    Inventors: Huibert Visser, David William Callan, Robert-Han Munnig Schmidt, George Howard Robbins
  • Lithographic apparatus and device manufacturing method
    Patent number: 6879377
    Abstract: A lithographic projection apparatus includes a conduit that supplies utilities to a movable component in a vacuum chamber such as an object table, associated motor or sensor. The conduit comprises flexible metal bellows preventing out-gassing of the conduit due to the vacuum in the vacuum chamber while allowing movement of the movable component in at least a first degree of freedom.
    Type: Grant
    Filed: November 27, 2002
    Date of Patent: April 12, 2005
    Assignee: ASML Netherlands B.V.
    Inventors: Hernes Jacobs, Piet Vosters, Sven Antoin Johan Hol, Harmen Klaas Van Der Schoot, Robert Johannes Petrus Van Diesen, David William Callan
  • Lithographic apparatus and device manufacturing method
    Publication number: 20030137643
    Abstract: A lithographic projection apparatus includes a conduit that supplies utilities to a movable component in a vacuum chamber such as an object table, associated motor or sensor. The conduit comprises flexible metal bellows preventing out-gassing of the conduit due to the vacuum in the vacuum chamber while allowing movement of the movable component in at least a first degree of freedom.
    Type: Application
    Filed: November 27, 2002
    Publication date: July 24, 2003
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Hernes Jacobs, Piet Vosters, Sven Antoin Johan Hol, Harmen Klaas Van Der Schoot, Robert Johannes Petrus Van Diesen, David William Callan