Patents by Inventor David William Kinnard

David William Kinnard has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Reactor assembly and processing method
    Patent number: 7163587
    Abstract: A reactor assembly and processing method for treating a substrate generally includes a base unit, a chuck assembly, a process chamber, an inlet manifold assembly and an exit manifold assembly. The inlet manifold assembly is in fluid communication with a first opening of the process chamber, wherein the inlet manifold assembly comprises a flow-shaping portion adapted to laterally elongate a gas and/or a reactant flow into the process chamber. The exhaust manifold assembly in fluid communication with a second opening of the process chamber and is diametrically opposed to the inlet manifold assembly. The process includes flowing a gas and/or reactive species into the process chamber of the reactor assembly in a direction that is about planar with the substrate surface providing improved uniformity and increased reactivity.
    Type: Grant
    Filed: February 8, 2002
    Date of Patent: January 16, 2007
    Assignee: Axcelis Technologies, Inc.
    Inventors: David William Kinnard, David Ferris
  • Wafer transport apparatus
    Patent number: 6969227
    Abstract: A loadlock chamber assembly includes a loadlock chamber, a sub-chamber removably attached to the loadlock chamber and a first robot arm having a primary pivot axis within the sub-chamber, wherein the first robot arm can move a substrate from a position approximately in a center of the loadlock chamber to a position outside the loadlock chamber.
    Type: Grant
    Filed: September 16, 2003
    Date of Patent: November 29, 2005
    Assignee: Axcolis Technologies, Inc.
    Inventors: David William Kinnard, Daniel Richardson
  • Wafer transport apparatus
    Patent number: 6877946
    Abstract: A loadlock chamber assembly includes a loadlock chamber, a sub-chamber removably attached to the loadlock chamber and a first robot arm having a primary pivot axis within the sub-chamber, wherein the first robot arm can move a substrate from a position approximately in a center of the loadlock chamber to a position outside the loadlock chamber.
    Type: Grant
    Filed: September 16, 2003
    Date of Patent: April 12, 2005
    Assignee: Axcelis Technologies, Inc.
    Inventors: David William Kinnard, Daniel Richardson
  • Wafer transport apparatus
    Publication number: 20040076505
    Abstract: A loadlock chamber assembly includes a loadlock chamber, a sub-chamber removably attached to the loadlock chamber and a first robot arm having a primary pivot axis within the sub-chamber, wherein the first robot arm can move a substrate from a position approximately in a center of the loadlock chamber to a position outside the loadlock chamber.
    Type: Application
    Filed: September 16, 2003
    Publication date: April 22, 2004
    Inventors: David William Kinnard, Daniel Richardson
  • Wafer transport apparatus
    Publication number: 20040052632
    Abstract: A loadlock chamber assembly includes a loadlock chamber, a sub-chamber removably attached to the loadlock chamber and a first robot arm having a primary pivot axis within the sub-chamber, wherein the first robot arm can move a substrate from a position approximately in a center of the loadlock chamber to a position outside the loadlock chamber.
    Type: Application
    Filed: September 16, 2003
    Publication date: March 18, 2004
    Inventors: David William Kinnard, Daniel Richardson
  • Wafer transport apparatus
    Patent number: 6663333
    Abstract: A loadlock chamber assembly includes a loadlock chamber, a sub-chamber removably attached to the loadlock chamber and a first robot arm having a primary pivot axis within the sub-chamber, wherein the first robot arm can move a substrate from a position approximately in a center of the loadlock chamber to a position outside the loadlock chamber.
    Type: Grant
    Filed: July 13, 2001
    Date of Patent: December 16, 2003
    Assignee: Axcelis Technologies, Inc.
    Inventors: David William Kinnard, Daniel Richardson
  • Reactor assembly and processing method
    Publication number: 20030150560
    Abstract: A reactor assembly and processing method for treating a substrate generally includes a base unit, a chuck assembly, a process chamber, an inlet manifold assembly and an exit manifold assembly. The inlet manifold assembly is in fluid communication with a first opening of the process chamber, wherein the inlet manifold assembly comprises a flow-shaping portion adapted to laterally elongate a gas and/or a reactant flow into the process chamber. The exhaust manifold assembly in fluid communication with a second opening of the process chamber and is diametrically opposed to the inlet manifold assembly. The process includes flowing a gas and/or reactive species into the process chamber of the reactor assembly in a direction that is about planar with the substrate surface providing improved uniformity and increased reactivity.
    Type: Application
    Filed: February 8, 2002
    Publication date: August 14, 2003
    Inventors: David William Kinnard, David Ferris
  • Wafer transport apparatus
    Publication number: 20030012624
    Abstract: A loadlock chamber assembly includes a loadlock chamber, a sub-chamber removably attached to the loadlock chamber and a first robot arm having a primary pivot axis within the sub-chamber, wherein the first robot arm can move a substrate from a position approximately in a center of the loadlock chamber to a position outside the loadlock chamber.
    Type: Application
    Filed: July 13, 2001
    Publication date: January 16, 2003
    Inventors: David William Kinnard, Daniel Richardson