Patents by Inventor David William Weyburne

David William Weyburne has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Spin coating of substrate with chemical
    Patent number: 6716285
    Abstract: A spin coating apparatus and method of manufacturing incorporating a perforated sheet located above the substrate in a manner to control solvent evaporation that tends to occur in the coating vessel when the chuck is rotated without introducing additional airflow complications. The distance between the substrate surface and the perforated sheet, and the number, distribution, and size of the perforations in the perforated sheet can be adjusted to optimize the uniformity of film thickness coating the substrate. The result is reduced substrate and room contamination and enhanced coating uniformity.
    Type: Grant
    Filed: October 23, 2002
    Date of Patent: April 6, 2004
    Assignee: The United States of America as represented by the Secretary of the Air Force
    Inventors: David William Weyburne, Qing Sun-Paduano