Abstract: There is provided a fluid sensing apparatus comprising a fluid flow channel, at least one fluid conduit in fluid communication with the fluid flow channel, and a fluid sensor having a casing and at least one sensor port in fluid communication with the at least one fluid conduit and providing access into the casing. The fluid sensing apparatus also includes a pressure compensation chamber in which the casing of the fluid sensor is enclosed. The apparatus further includes at least one pressure compensation conduit in fluid communication with the pressure compensation chamber and with the fluid flow channel. Also provided is a mass flow controller including such a fluid sensing apparatus.

Abstract: A fluid sensing apparatus is provided having a fluid flow channel having a flow restriction. A fluid sensor is in fluid communication with first and second fluid ports, and a laminar flow element. The laminar flow element includes a flow stabilisation rod which defines a fluid sensing portion of the fluid flow channel. The flow restriction comprises a reduction in the hydraulic diameter of the fluid sensing portion of the fluid flow channel which is caused by a decrease in diameter of the fluid flow channel, or by an increase in the diameter of the flow stabilisation rod, or by both a decrease in diameter of the fluid flow channel and an increase in the diameter of the flow stabilisation rod. Also provided is a mass flow controller including such a fluid sensing apparatus.

Abstract: There is provided a fluid sensing apparatus comprising a fluid flow channel, at least one fluid conduit in fluid communication with the fluid flow channel, and a fluid sensor having a casing and at least one sensor port in fluid communication with the at least one fluid conduit and providing access into the casing. The fluid sensing apparatus also includes a pressure compensation chamber in which the casing of the fluid sensor is enclosed. The apparatus further includes at least one pressure compensation conduit in fluid communication with the pressure compensation chamber and with the fluid flow channel. Also provided is a mass flow controller including such a fluid sensing apparatus.

Abstract: There is provided a fluid sensing apparatus (120) comprising a fluid flow channel (121) having a flow restriction (125), a first fluid port (132) at a first location (131) upstream of the flow restriction, a second fluid port (134) at a second location (133) downstream of the flow restriction, a fluid sensor (130) in fluid communication with the first fluid port and second fluid port, and a laminar flow element (150). The laminar flow element includes a flow stabilisation rod (151) which extends along the fluid flow channel at least from the first location to the second location to define a fluid sensing portion of the fluid flow channel between the outer wall (122) of the fluid flow channel and the outer surface (153) of the flow stabilisation rod.

Abstract: Electrical current transducer (2) of a closed-loop type for measuring a primary current (IP) flowing in a primary conductor (1), comprising a fluxgate measuring head (7) and an electronic circuit (16) including a microprocessor (18) for digital signal processing. The measuring head includes a secondary coil (6) and a fluxgate detector (4) comprising an excitation coil and a magnetic material core. The electronic circuit comprises an excitation coil drive circuit (14) configured to generate an alternating excitation voltage to supply the excitation coil with an alternating excitation current (Ifx), the secondary coil (6) connected in a feedback loop (12) of the electronic circuit to the excitation coil drive circuit (14), the electronic circuit further comprising a ripple compensation circuit (26, 28) configured to compensate for a ripple signal generated by the alternating excitation voltage.

Abstract: Electrical current transducer (2) of a closed-loop type for measuring a primary current (Ip) flowing in a primary conductor (1), comprising a fluxgate measuring head (7) and an electronic circuit (16) including a microprocessor (18) for digital signal processing. The measuring head includes a secondary coil (6) and a fluxgate detector (4) comprising an excitation coil and a magnetic material core. The electronic circuit comprises an excitation coil drive circuit (14) configured to generate an alternating excitation voltage to supply the excitation coil with an alternating excitation current (Ifx), the secondary coil (6) connected in a feedback loop (12) of the electronic circuit to the excitation coil drive circuit (14), the electronic circuit further comprising a ripple compensation circuit (26, 28) configured to compensate for a ripple signal generated by the alternating excitation voltage.

Abstract: Electrical current sensor comprising a measuring circuit (6) and an inductor (4) for measuring a primary current IP flowing in a primary conductor (2), the inductor comprising a saturable magnetic core (10) made of a highly permeable magnetic material and a secondary coil (12) for carrying an alternating excitation i configured to alternatingly saturate the magnetic core, the coil being connected to the measuring circuit. The measuring circuit is configured to supply a positive or negative voltage to the inductor, to switch off the voltage when a condition signalling saturation is reached, to measure the time to saturation t1 in one direction and the time to saturation t2 in the other direction of the magnetic core and determine therefrom a value of the primary current for small current amplitudes, the measuring circuit being further configured for evaluating the average value of the excitation current i and determining therefrom the value of the primary current for large currents.

Abstract: Electrical current sensor comprising a measuring circuit (6) and an inductor (4) for measuring a primary current IP flowing in a primary conductor (2), the inductor comprising a saturable magnetic core (10) made of a highly permeable magnetic material and a secondary coil (12) for carrying an alternating excitation i configured to alternatingly saturate the magnetic core, the coil being connected to the measuring circuit. The measuring circuit is configured to supply a positive or negative voltage to the inductor, to switch off the voltage when a condition signalling saturation is reached, to measure the time to saturation t1 in one direction and the time to saturation t2 in the other direction of the magnetic core and determine therefrom a value of the primary current for small current amplitudes, the measuring circuit being further configured for evaluating the average value of the excitation current i and determining therefrom the value of the primary current for large currents.