Abstract: A microelectromechanical gyroscope includes a movable mass, a movable sensing electrode of the movable mass, a fixed sensing electrode capacitively coupled to the movable sensing electrode, and a bias terminal of the movable mass. A calibration method includes: applying a sequence of forcing signals to the bias terminal having a forcing time and that are determined by time variable signals superimposed on respective forcing bias voltages selected in a range; acquiring a sequence of sense signals indicative of a damped oscillation of the movable mass along a sense direction caused by respective forcing signals consecutively to respective forcing times; estimating from the sense signals a sequence of respective natural sense frequencies, each dependent on the corresponding forcing bias voltage; and estimating a sense gap from the sequence of natural sense frequencies that is indicative of a distance at rest between the movable sensing electrode and the fixed sensing electrode.

Abstract: A MEMS metamaterial has a substrate and a suspended structure having an elementary cell which extends at a distance from the substrate along a first direction. The elementary cell has a first structural region having a first material with a first coefficient of thermal expansion. The first structural region has a first side facing the substrate and a second side opposite to the first side. The elementary cell also has a second structural region having a second material different from the first material and with a second coefficient of thermal expansion different from the first coefficient of thermal expansion. The second structural region extends on at least part of the first structural region, on the first side, the second side, or both the first and second side of the first structural region.