Patents by Inventor Davis Pays-Volard

Davis Pays-Volard has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and Apparatus for Plasma Dicing a Semi-Conductor Wafer
    Publication number: 20140242780
    Abstract: The present invention provides a method for plasma dicing a substrate. The method comprising: providing a process chamber having a wall; providing a plasma source adjacent to the wall of the process chamber; providing a work piece support within the process chamber; placing the substrate on a carrier support to form a work piece; providing an intermediate ring interposed between the substrate and the frame; loading the work piece onto the work piece support; generating a plasma through the plasma source; and etching the work piece through the generated plasma.
    Type: Application
    Filed: March 7, 2014
    Publication date: August 28, 2014
    Applicant: Plasma-Therm LLC
    Inventors: Rich Gauldin, Dwarakanath Geerpuram, Ken Mackenzie, Thierry Lazerand, Davis Pays-Volard, Linnell Martinez, Russell Westerman, Gordon M. Grivna, Jason Doub