Patents by Inventor Da-Wei Gao

Da-Wei Gao has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8551831
    Abstract: An integrated circuit semiconductor device, e.g., MOS, CMOS. The device has a semiconductor substrate. The device also has a dielectric layer overlying the semiconductor substrate and a gate structure overlying the dielectric layer. A dielectric layer forms sidewall spacers on edges of the gate structure. A recessed region is within a portion of the gate structure within the sidewall spacer structures. An epitaxial fill material is within the recessed region. The device has a source recessed region and a drain recessed region within the semiconductor substrate and coupled to the gate structure. The device has an epitaxial fill material within the source recessed region and within the drain recessed region. A channel region is between the source region and the drain region is in a strain characteristic from at least the fill material formed in the source region and the drain region.
    Type: Grant
    Filed: September 19, 2008
    Date of Patent: October 8, 2013
    Assignees: Semiconductor Manufacturing International (Shanghai) Corporation, Semiconductor Manufacturing International (Beijing) Corporation
    Inventors: Da Wei Gao, Bei Zhu, Hanming Wu, John Chen, Paolo Bonfanti
  • Patent number: 7557000
    Abstract: A method for forming an strained silicon integrated circuit device. The method includes providing a semiconductor substrate and forming a dielectric layer overlying the semiconductor substrate. The method also includes forming a gate layer overlying the dielectric layer and forming a hard mask overlying the gate layer. The method patterns the gate layer to form a gate structure including edges using the hard mask as a protective layer. The method forms a dielectric layer overlying the gate structure to protect the gate structure including the edges. The method forms spacers from the dielectric layer, while maintaining the hard mask overlying the gate structure. The method etches a source region and a drain region adjacent to the gate structure using the dielectric layer and the hard mask as a protective layer, while the hard mask prevents any portion of the gate structure from being exposed. In a preferred embodiment, the method maintains the hard mask overlying the gate structure.
    Type: Grant
    Filed: December 12, 2006
    Date of Patent: July 7, 2009
    Assignee: Semiconductor Manufacturing International (Shanghai) Corporation
    Inventors: John Chen, Hanming Wu, Da Wei Gao, Bei Zhu, Paolo Bonfanti
  • Publication number: 20090152599
    Abstract: An integrated circuit semiconductor device, e.g., MOS, CMOS. The device has a semiconductor substrate. The device also has a dielectric layer overlying the semiconductor substrate and a gate structure overlying the dielectric layer. A dielectric layer forms sidewall spacers on edges of the gate structure. A recessed region is within a portion of the gate structure within the sidewall spacer structures. An epitaxial fill material is within the recessed region. The device has a source recessed region and a drain recessed region within the semiconductor substrate and coupled to the gate structure. The device has an epitaxial fill material within the source recessed region and within the drain recessed region. A channel region is between the source region and the drain region is in a strain characteristic from at least the fill material formed in the source region and the drain region.
    Type: Application
    Filed: September 19, 2008
    Publication date: June 18, 2009
    Applicant: Semiconductor Manufacturing International (Shanghai) Corporation
    Inventors: Da Wei Gao, Bei Zhu, Hanming Wu, John Chen, Paolo Bonfanti
  • Publication number: 20080173941
    Abstract: A semiconductor integrated circuit device comprising a semiconductor substrate, e.g., silicon wafer, silicon on insulator. The device has a dielectric layer overlying the semiconductor substrate and a gate structure overlying the dielectric layer. The device also has a channel region within a portion of the semiconductor substrate within a vicinity of the gate structure and a lightly doped source/drain regions in the semiconductor substrate to from diffused pocket regions underlying portions of the gate structure. The device has sidewall spacers on edges of the gate structure. The device also has an etched source region and an etched drain region. Each of the first source region and the first drain region is characterized by a recessed region having substantially vertical walls, a bottom region, and rounded corner regions connecting the vertical walls to the bottom region.
    Type: Application
    Filed: February 24, 2007
    Publication date: July 24, 2008
    Applicant: Semiconductor Manufacturing International (Shanghai) Corporation
    Inventors: Bei Zhu, Paolo Bonfanti, Hanming Wu, Da Wei Gao, John Chen
  • Publication number: 20080119032
    Abstract: A method for forming an strained silicon integrated circuit device. The method includes providing a semiconductor substrate and forming a dielectric layer overlying the semiconductor substrate. The method also includes forming a gate layer overlying the dielectric layer and forming a hard mask overlying the gate layer. The method patterns the gate layer to form a gate structure including edges using the hard mask as a protective layer. The method forms a dielectric layer overlying the gate structure to protect the gate structure including the edges. The method forms spacers from the dielectric layer, while maintaining the hard mask overlying the gate structure. The method etches a source region and a drain region adjacent to the gate structure using the dielectric layer and the hard mask as a protective layer, while the hard mask prevents any portion of the gate structure from being exposed. In a preferred embodiment, the method maintains the hard mask overlying the gate structure.
    Type: Application
    Filed: December 12, 2006
    Publication date: May 22, 2008
    Applicant: Semiconductor Manufacturing International (Shanghai) Corporation
    Inventors: John Chen, Hanming Wu, Da Wei Gao, Bei Zhu, Paolo Bonfanti
  • Patent number: 6485574
    Abstract: Process for manufacturing crystallized sugar from an aqueous sugar solution containing colorants, polyvalent cations such as Ca2+ and Mg2+ ions and possibly polyvalent anions, said process comprising the step of submitting said solution to a crystallization procedure to obtain a crystallized sugar, the process being characterized in that, in order to decrease the occlusion of colorants in the crystals of said crystallized sugar, it further comprises the step of treating said solution so as to increase the number of polyvalent anion equivalents such as adding COB− anions with regard to the number of polyvalent cation equivalents in said solution.
    Type: Grant
    Filed: June 23, 2000
    Date of Patent: November 26, 2002
    Inventors: Chung-Chi Chou, Ya-Guang Min, Da-Wei Gao, Marc-Andre Theoleyre