Abstract: A vacuum exhaust system and method of evacuating a plurality of chambers is disclosed. The vacuum exhaust system is within a clean room and comprises: a plurality of branch process gas channels each configured to connect to a corresponding chamber and a shared process channel formed from a confluence of the branch channels and configured to provide a shared fluid communication path for process gas from each of the chambers to flow from the clean room to a process channel outside of the clean room. There is also a plurality of branch pumpdown channels each configured to connect to a corresponding chamber and a shared pumpdown channel formed from a confluence of the branch pumpdown channels and configured to provide a fluid communication path for fluid to flow from the clean room to a pumpdown channel outside of the clean room during pumpdown of at least one of the vacuum chambers.

Abstract: A molecular pump has a cylindrical casing, a stator portion formed in the casing, a shaft disposed in the stator portion, a bearing pivotally supporting the shaft with respect to the stator portion, a rotor that is attached to the shaft and rotates integrally with the shaft, a motor for rotationally driving the shaft, a shock absorbing member, and a flange portion provided at an end portion of the casing. The flange portion has a bolt hole through which extends a bolt for fixing the casing and a fixed member to each other and an insertion hole which is provided adjacent to the bolt hole and in which the shock absorbing member is inserted so that at least one end side of the shock absorbing member extending along an axial direction of the bolt is spaced apart from the bolt.

Abstract: To form a shock absorbing structure more easily. A shock absorbing structure for consuming shock energy is provided on the flange of a molecular pump. An insertion hole is provided in the flange, and a shock absorbing member formed by an independent and small part is fitted and fixed in this insertion hole. A bolt hole is provided to cause a bolt for fixing the flange and a vacuum vessel in the shock absorbing member to pass therethrough. The shock absorbing member is provided with a thin-wall portion by forming a cavity portion. In the case where a shock in the rotation direction of a rotor portion is produced in the molecular pump, for example, by fracture of the rotor portion, the flange slides in the rotation direction of the rotor portion together with the molecular pump. Thus, the bolt that fixes the flange to the flange of the vacuum pump hits the shock absorbing member, thereby the shock absorbing member is subjected to plastic deformation.

Abstract: The present invention is an apparatus and method for controlling a process flow rate and a pressure in a vacuum process chamber that is evacuated by a turbomolecular pump. A throttle valve between the pump and the process chamber is controlled to regulate the pressure and flow rate. A backing valve downstream of the pump is also controlled to maintain the setting of the throttle valve within a preferred, stable operating range.

Abstract: The present invention is an apparatus and method for controlling a process flow rate and a pressure in a vacuum process chamber that is evacuated by a turbomolecular pump. A throttle valve between the pump and the process chamber is controlled to regulate the pressure and flow rate. A backing valve downstream of the pump is also controlled to maintain the setting of the throttle valve within a preferred, stable operating range.

Abstract: A stator core for an electrical machine includes an annular yoke and a plurality of teeth spaced circumferentially on the annular yoke and extending radially therefrom, the spaces between the teeth defining circumferentially spaced winding slots. The teeth are formed as separate components from a soft magnetic powder material. Each tooth has non-decreasing cross-sectional dimensions in a direction towards a distal tip along a length of the tooth corresponding to a winding slot, and has the same or smaller cross-sectional dimensions along a proximal end of the tooth. Thereby, the tooth may be assembled with a core-back section of the annular yoke and is able to receive a coil before the assembling with the yoke.