Abstract: The present disclosure discloses a MEMS grating and a fabrication method. The MEMS grating includes a substrate layer, an insulation layer and a deformable layer. The deformable layer is made of a continuous conductive material, the insulation layer is distributed along transverse intervals on the substrate layer, and a cavity is formed between every two adjacent insulation layers. The deformable layer includes movable grating bars and fixed grating bars. The fixed grating bars are fixedly connected with the insulation layer, and the movable grating bars correspond to the cavities. A plurality of through holes are formed in the movable grating bars. During wet etching, the movable grating bars generate upwards buckling deformation, which increase an initial gap between the movable grating bars and a substrate. An adhesion effect caused by the wet etching is eliminated, which reduces permanent failures caused by the adhesion effect.

Abstract: A method and circuit for obtaining a capacitive feedback signal of a capacitive feedback micro torsion mirror are provided to solve the problem of poor stability of the capacitive feedback signals of the micro torsion mirror. First, a pulse signal is used as a driving signal to drive the capacitive feedback micro torsion mirror to vibrate; it is ensured that the micro torsion mirror may twist freely for at least 0.5 cycles during an interval of two adjacent sets of driving pulses; secondly, the capacitive feedback signal of the capacitive feedback micro torsion mirror is extracted, and converted into a voltage signal; then, the voltage signal is amplified; and finally extracted during the interval of the two adjacent sets of driving pulses, and taken as a real capacitive feedback signal. A carrier generation circuit and a detection circuit are omitted, and the influence of the carrier generation circuit and the detection circuit on a capacitive feedback signal is eliminated.

Abstract: A method and circuit for obtaining a capacitive feedback signal of a capacitive feedback micro torsion mirror are provided to solve the problem of poor stability of the capacitive feedback signals of the micro torsion mirror. First, a pulse signal is used as a driving signal to drive the capacitive feedback micro torsion mirror to vibrate; it is ensured that the micro torsion mirror may twist freely for at least 0.5 cycles during an interval of two adjacent sets of driving pulses; secondly, the capacitive feedback signal of the capacitive feedback micro torsion mirror is extracted, and converted into a voltage signal; then, the voltage signal is amplified; and finally extracted during the interval of the two adjacent sets of driving pulses, and taken as a real capacitive feedback signal. A carrier generation circuit and a detection circuit are omitted, and the influence of the carrier generation circuit and the detection circuit on a capacitive feedback signal is eliminated.