Patents by Inventor Dean Berlin

Dean Berlin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for improved azimuthal thermal uniformity of a substrate
    Patent number: 7964038
    Abstract: Methods and apparatus for providing an improved azimuthal thermal uniformity of a substrate are provided herein. In some embodiments, a substrate support for use in a semiconductor process chamber includes a susceptor plate; and a supporting member to support a backside of the susceptor plate proximate an outer edge thereof, wherein the supporting member substantially covers the backside of the susceptor plate. In some embodiments, the substrate support is disposed in a process chamber having at least some lamps disposed below the supporting member and utilized for heating the back side of the susceptor plate.
    Type: Grant
    Filed: October 2, 2008
    Date of Patent: June 21, 2011
    Assignee: Applied Materials, Inc.
    Inventors: Kailash Kiran Patalay, Jean R. Vatus, Dean Berlin
  • METHODS AND APPARATUS FOR IMPROVED AZIMUTHAL THERMAL UNIFORMITY OF A SUBSTRATE
    Publication number: 20100086784
    Abstract: Methods and apparatus for providing an improved azimuthal thermal uniformity of a substrate are provided herein. In some embodiments, a substrate support for use in a semiconductor process chamber includes a susceptor plate; and a supporting member to support a backside of the susceptor plate proximate an outer edge thereof, wherein the supporting member substantially covers the backside of the susceptor plate. In some embodiments, the substrate support is disposed in a process chamber having at least some lamps disposed below the supporting member and utilized for heating the back side of the susceptor plate.
    Type: Application
    Filed: October 2, 2008
    Publication date: April 8, 2010
    Applicant: APPLIED MATERIALS, INC.
    Inventors: KAILASH KIRAN PATALAY, Jean R. Vatus, Dean Berlin