Abstract: Methods for manufacturing rotary target materials that allows a material to be cast in a melting zone of a casting vessel while the vessel is rotated such that a melting zone is below a casting zone. The vessel is sealed and the pressure inside the vessel is reduced and the exterior of the vessel is heated. The melting zone of the vessel is heated to a temperature that melts the material and releases any trapped gasses which can be pumped out using the vacuum pump. Once the melting zone and molten material have reached a specified temperature, outgassed, and the casting zone has reached a temperature to maximize adhesion and reduce voids and defects, the vessel is rotated until the melting zone is directly above the casting zone to transfer the material from the melting zone to the casting zone.

Abstract: The process that is the subject of this invention is a method of making a rotary sputtering target having the steps of providing a cylinder of sputtering target material having an adhesion-wetting layer on its inside surface; providing a stainless steel sputtering target backing tube having an outside diameter smaller than the sputtering target material inside diameter, the backing tube having an adhesion-wetting layer on its outside surface; welding an upper and lower stainless steel retaining ring to the backing tube adjacent to the sputtering target material so that the target material is in compression and the backing tube in tension; and introducing molten bonding material into the annulus between the backing tube and the sputtering target material.

Abstract: The process that is the subject of this invention is a method of making a rotary sputtering target having the steps of providing a cylinder of sputtering target material having an adhesion-wetting layer on its inside surface; providing a stainless steel sputtering target backing tube having an outside diameter smaller than the sputtering target material inside diameter, the backing tube having an adhesion-wetting layer on its outside surface; welding an upper and lower stainless steel retaining ring to the backing tube adjacent to the sputtering target material so that the target material is in compression and the backing tube in tension; and introducing molten bonding material into the annulus between the backing tube and the sputtering target material.

Abstract: A sputtering cathode apparatus having a hollow cylindrical sputter target that is fixed or rotatable about its central axis and an internal magnet assembly that is rotated axially within the sputter target.

Abstract: The process that is the subject of this invention is a method of making a rotary sputtering target having the steps of providing a cylinder of sputtering target material having an adhesion-wetting layer on its inside surface; providing a stainless steel sputtering target backing tube having an outside diameter smaller than the sputtering target material inside diameter, the backing tube having an adhesion-wetting layer on its outside surface; welding an upper and lower stainless steel retaining ring to the backing tube adjacent to the sputtering target material so that the target material is in compression and the backing tube in tension; and introducing molten bonding material into the annulus between the backing tube and the sputtering target material.

Abstract: A gravity-fed in-line continuous processing system includes at least one processing chamber disposed between a first load lock and a second load lock. The second load lock is disposed lower than the first load lock. A first device isolates the processing chamber from the first load lock. A second device isolates the processing chamber from the second load lock. There is at least one track through the processing chamber and the first and second load locks. The track is structured and arranged such that an article slides thereon under the force of gravity.

Abstract: A method for coating substrates includes providing at least one processing chamber and disposing the processing chamber between a first load lock and a second load lock, the second load lock disposed lower than the first load lock. The method further includes isolating the processing chamber from the first load lock, isolating the processing chamber from the second load lock, and providing at least one track through the processing chamber and the first and second load locks and structuring and arranging the track such that an article slides thereon under the force of gravity.

Abstract: A rotary barrel gate valve includes a body and at least one passage through the body defining an inlet and an outlet. There is a first actuator for rotating the body, a second actuator for translating the body, and a sealing portion on the body which seals the body with respect to an opening into a chamber adjacent the body.

Abstract: A method for coating substrates includes providing at least one processing chamber and disposing the processing chamber between a first load lock and a second load lock, the second load lock disposed lower than the first load lock. The method further includes isolating the processing chamber from the first load lock, isolating the processing chamber from the second load lock, and providing at least one track through the processing chamber and the first and second load locks and structuring and arranging the track such that an article slides thereon under the force of gravity.

Abstract: A gravity-fed in-line continuous processing system includes at least one processing chamber disposed between a first load lock and a second load lock. The second load lock is disposed lower than the first load lock. A first device isolates the processing chamber from the first load lock. A second device isolates the processing chamber from the second load lock. There is at least one track through the processing chamber and the first and second load locks. The track is structured and arranged such that an article slides thereon under the force of gravity.

Abstract: A rotary barrel gate valve includes a body and at least one passage through the body defining an inlet and an outlet. There is a first actuator for rotating the body, a second actuator for translating the body, and a sealing portion on the body which seals the body with respect to an opening into a chamber adjacent the body.