Patents by Inventor Dean Shough

Dean Shough has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Thermal management systems, assemblies and methods for grazing incidence collectors for EUV lithography
    Patent number: 8746975
    Abstract: Systems, assemblies and methods for thermally managing a grazing incidence collector (GIC) for EUV lithography applications are disclosed. The GIC thermal management assembly includes a GIC mirror shell interfaced with a jacket to form a sealed chamber. An open cell, heat transfer (OCHT) material is disposed within the metal chamber and is thermally and mechanically bonded with the GIC mirror shell and jacket. A coolant is flowed in an azimuthally symmetric fashion through the OCHT material between input and output plenums to effectuate cooling when the GIC thermal management assembly is used in a GIC mirror system configured to receive and form collected EUV radiation from an EUV radiation source.
    Type: Grant
    Filed: January 23, 2012
    Date of Patent: June 10, 2014
    Assignee: Media Lario S.R.L.
    Inventors: Giovanni Bianucci, Fabio Zocchi, Robert Banham, Marco Pedrali, Boris Grek, Natale Ceglio, Dean Shough, Gordon Yue, Daniel Stearns, Richard A. Levesque, Giuseppe Valsecchi
  • THERMAL MANAGEMENT SYSTEMS, ASSEMBLIES AND METHODS FOR GRAZING INCIDENCE COLLECTORS FOR EUV LITHOGRAPHY
    Publication number: 20120212719
    Abstract: Systems, assemblies and methods for thermally managing a grazing incidence collector (GIC) for EUV lithography applications are disclosed. The GIC thermal management assembly includes a GIC mirror shell interfaced with a jacket to form a sealed chamber. An open cell, heat transfer (OCHT) material is disposed within the metal chamber and is thermally and mechanically bonded with the GIC mirror shell and jacket. A coolant is flowed in an azimuthally symmetric fashion through the OCHT material between input and output plenums to effectuate cooling when the GIC thermal management assembly is used in a GIC mirror system configured to receive and form collected EUV radiation from an EUV radiation source.
    Type: Application
    Filed: January 23, 2012
    Publication date: August 23, 2012
    Inventors: Giovanni Bianucci, Fabio Zocchi, Robert Banham, Marco Pedrali, Boris Grek, Natale Ceglio, Dean Shough, Daniel Stearns, Richard A. Levesque, Gordon Yue, Giuseppe Valsecchi