Abstract: Methods of scaling the thickness of the interfacial layer in electronic devices, such as NMOS transistors and PMOS transistors are described. Some embodiments provide a metal film or a metal nitride film that reduces the thickness of the interfacial layer by scavenging unbound oxygen from the interfacial layer (e.g., silicon oxide (SiOx)) and the high-? dielectric layer (e.g., hafnium oxide (HfOx)). Some embodiments advantageously include annealing the semiconductor substrate to promote or accelerate the scavenging.

Abstract: Methods for depositing metal films using a metal halide and metal organic precursors are described. The substrate is exposed to a first metal precursor and a second metal precursor to form the metal film. The exposures can be sequential or simultaneous. The metal films are relatively pure with a low carbon content.

Abstract: Methods of manufacturing electronic devices are described. Embodiments of the present disclosure advantageously provide methods of manufacturing electronic devices that meet reduced thickness, reduced leakage, lower thermal budget, and Vt requirements (including multi-Vt), and have improved device performance and reliability. The method comprises forming a P-dipole stack and an N-dipole stack on a semiconductor substrate by: depositing an interfacial layer (e.g., silicon oxide (SiOx)) on the top surface of the channel; depositing a hafnium-containing layer comprising hafnium oxide (HfOx) and having a thickness of less than or equal to 5 ? on the interfacial layer; and depositing a dipole layer comprising lanthanum nitride (LaN) on the hafnium-containing layer.

Abstract: Techniques herein use rules automation and template pluggable databases to facilitate deployment into container databases. In an embodiment, a system of computers loads rules into a rules engine. Each rule associates a predicate with suitable container databases. The system receives a request to install a target pluggable database. The rules engine detects satisfied rules whose predicates match the request. Based on the suitable container databases of the satisfied rules, the rules engine selects a particular container database. The system installs the target pluggable database into the particular container database. In an embodiment, a system of computers stores a plurality of template pluggable databases in a repository. The repository receives an installation request. Based on the installation request, the system selects a particular template pluggable database. The system installs the particular template pluggable database into a container database.

Abstract: Techniques herein use rules automation and template pluggable databases to facilitate deployment into container databases. In an embodiment, a system of computers loads rules into a rules engine. Each rule associates a predicate with suitable container databases. The system receives a request to install a target pluggable database. The rules engine detects satisfied rules whose predicates match the request. Based on the suitable container databases of the satisfied rules, the rules engine selects a particular container database. The system installs the target pluggable database into the particular container database. In an embodiment, a system of computers stores a plurality of template pluggable databases in a repository. The repository receives an installation request. Based on the installation request, the system selects a particular template pluggable database. The system installs the particular template pluggable database into a container database.

Abstract: Techniques herein use rules automation and template pluggable databases to facilitate deployment into container databases. In an embodiment, a system of computers loads rules into a rules engine. Each rule associates a predicate with suitable container databases. The system receives a request to install a target pluggable database. The rules engine detects satisfied rules whose predicates match the request. Based on the suitable container databases of the satisfied rules, the rules engine selects a particular container database. The system installs the target pluggable database into the particular container database. In an embodiment, a system of computers stores a plurality of template pluggable databases in a repository. The repository receives an installation request. Based on the installation request, the system selects a particular template pluggable database. The system installs the particular template pluggable database into a container database.