Patents by Inventor Deborah A. Parsons

Deborah A. Parsons has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Trench isolation with planar topography and method of fabrication
    Patent number: 5358891
    Abstract: A method of forming and refilling a trench in a substrate. First a trench is formed in the substrate. The trench is then refilled with a conformal material. Next, a recess is etched into the top portion of the refilled trench. The recess is then refilled with a second material until the refilled recess and substrate are substantially planar.
    Type: Grant
    Filed: June 29, 1993
    Date of Patent: October 25, 1994
    Assignee: Intel Corporation
    Inventors: Chi-Hwa Tsang, Kerry L. Spurgin, Deborah A. Parsons, William L. Hargrove, Ganesan Radhakrishnan