Patents by Inventor Debra A. Desrochers-Christos

Debra A. Desrochers-Christos has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • MOCVD of SBT using toluene-based solvent system for precursor delivery
    Patent number: 6660331
    Abstract: A solvent composition useful for liquid delivery MOCVD, comprising toluene and a Lewis base, wherein toluene is present at a concentration of from about 75% to about 98% by volume, based on the total volume of toluene and the Lewis base. Such solvent composition is usefully employed to dissolve or suspend precursors therein for liquid delivery MOCVD, e.g., MOCVD of ferroelectric material films such as SBT.
    Type: Grant
    Filed: December 7, 2001
    Date of Patent: December 9, 2003
    Assignee: Advanced Technology Materials, Inc.
    Inventors: Bryan C. Hendrix, Thomas H. Baum, Debra Desrochers Christos, Jeffrey F. Roeder
  • MOCVD of SBT using tetrahydrofuran-based solvent system for precursor delivery
    Patent number: 6511706
    Abstract: A precursor composition useful for liquid delivery MOCVD, including SBT precursors dissolved in a solvent system containing tetrahydrofuran. The associated liquid delivery MOCVD process may be carried out with vaporization of the precursor composition on a porous vaporization element having an average pore diameter in the range of from about 50 to about 200 micrometers, with the resultant precursor vapor being admixed with a carrier gas to achieve high efficiency formation of SBT films.
    Type: Grant
    Filed: November 16, 1999
    Date of Patent: January 28, 2003
    Assignee: Advanced Technology Materials, Inc.
    Inventors: Bryan C. Hendrix, Thomas H. Baum, Debra A. Desrochers-Christos, Jeffrey F. Roeder, Witold Paw
  • MOCVD of SBT using toluene based solvent system for precursor delivery
    Patent number: 6340386
    Abstract: A solvent composition useful for liquid delivery MOCVD, comprising toluene and a Lewis base, wherein toluene is present at a concentration of from about 75% to about 98% by volume, based on the total volume of toluene and the Lewis base. Such solvent composition is usefully employed to dissolve or suspend precursors therein for liquid delivery MOCVD, e.g., MOCVD of ferroelectric material films such as SBT.
    Type: Grant
    Filed: November 15, 1999
    Date of Patent: January 22, 2002
    Assignee: Advanced Technology Materials, Inc.
    Inventors: Bryan C. Hendrix, Thomas H. Baum, Debra Desrochers Christos, Jeffrey F. Roeder