Patents by Inventor Declan Liam Brett

Declan Liam Brett has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for chemical mechanical polishing
    Patent number: 6558236
    Abstract: Generally, a method and apparatus for polishing a substrate is provided. In one embodiment, an apparatus for polishing a substrate includes a polishing material having a fluid disposed thereon. The polishing material has a plurality of elements extending from a backing. The fluid that fills the entire volume between the elements comprising the polishing material has a viscosity between about 100 to about 10,000 centipoises. The fluid allows generation of a hydrostatic force that ensures the full and completed envelopment of fluid surrounding the fixed abrasive elements when polishing, thus substantially reducing the deformation of the elements, resulting in extended polishing material life.
    Type: Grant
    Filed: June 26, 2001
    Date of Patent: May 6, 2003
    Assignee: Applied Materials, Inc.
    Inventors: Timothy James Donohue, Declan Liam Brett, Gopalakrishna B. Prabhu, Winston Y. Su
  • Method and apparatus for chemical mechanical polishing
    Publication number: 20030013384
    Abstract: Generally, a method and apparatus for polishing a substrate is provided. In one embodiment, an apparatus for polishing a substrate includes a polishing material having a fluid disposed thereon. The polishing material has a plurality of elements extending from a backing. The fluid that fills the entire volume between the elements comprising the polishing material has a viscosity between about 100 to about 10,000 centipoises. The fluid allows generation of a hydrostatic force that ensures the full and completed envelopment of fluid surrounding the fixed abrasive elements when polishing, thus substantially reducing the deformation of the elements, resulting in extended polishing material life.
    Type: Application
    Filed: June 26, 2001
    Publication date: January 16, 2003
    Applicant: Applied Materials, Inc.
    Inventors: Timothy James Donohue, Declan Liam Brett, Gopalakrishna B. Prabhu, Winston Y. Su