Patents by Inventor Deepak Amirtharaj

Deepak Amirtharaj has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • EDGE ZONE COATING REMOVAL WITH WARPAGE COMPENSATION
    Publication number: 20260054350
    Abstract: An apparatus to remove at least a portion of a coating from a coated surface of a substrate may include a nozzle assembly and one or more nozzle-heads. Each nozzle-head may include at least one nozzle tip and a cavity configured to receive a portion of the coated surface of the substrate. The nozzle tip may be configured to direct an angled stream of an etchant on the substrate as the nozzle assembly moves along the length of the substrate. One or more sensors may measure a warpage of the substrate along the length of the substrate, and a controller may move the nozzle-head orthogonal to the direction of nozzle-head movement based on the measured warpage.
    Type: Application
    Filed: August 21, 2024
    Publication date: February 26, 2026
    Applicant: Yield Engineering Systems, Inc.
    Inventors: Pankaj Kumbhare, Sandeep Koppikar, Antin Shibu, Shiv Kumar, Krishna Channaiah, Paolo Banzon, Quynh Trinh, Deepak Amirtharaj