Patents by Inventor Deepak Doddabelavangala SRIKANTAIAH

Deepak Doddabelavangala SRIKANTAIAH has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Multi-plate faceplate for a processing chamber
    Patent number: 10811232
    Abstract: Embodiments of the disclosure relate to a multi-plate faceplate having a first plate and a second plate. The first plate has a plurality of first plate openings. The second plate has a first surface, an opposed second surface and a plurality of second plate openings extending therethrough. The first surface is mechanically coupled to the first plate. A second plate opening has a conical portion configured to be fluidly coupled to a first plate opening and decreasing in cross-section in the depth direction thereof from the second surface. A surface of the conical portion is coated with a protective coating adjacent to the first and second surfaces. In another embodiment, the first plate has a protrusion extending therefrom into a recess formed inwardly of the first surface. The protrusion has a passage extending therethrough fluidly connected to the recess, which is fluidly connected to the second plate opening.
    Type: Grant
    Filed: August 8, 2017
    Date of Patent: October 20, 2020
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Deepak Doddabelavangala Srikantaiah, Sheshraj L. Tulshibagwale, Saravjeet Singh, Alexander Tam
  • MULTI-PLATE FACEPLATE FOR A PROCESSING CHAMBER
    Publication number: 20190051499
    Abstract: Embodiments of the disclosure relate to a multi-plate faceplate having a first plate and a second plate. The first plate has a plurality of first plate openings. The second plate has a first surface, an opposed second surface and a plurality of second plate openings extending therethrough. The first surface is mechanically coupled to the first plate. A second plate opening has a conical portion configured to be fluidly coupled to a first plate opening and decreasing in cross-section in the depth direction thereof from the second surface. A surface of the conical portion is coated with a protective coating adjacent to the first and second surfaces. In another embodiment, the first plate has a protrusion extending therefrom into a recess formed inwardly of the first surface. The protrusion has a passage extending therethrough fluidly connected to the recess, which is fluidly connected to the second plate opening.
    Type: Application
    Filed: August 8, 2017
    Publication date: February 14, 2019
    Inventors: Deepak Doddabelavangala SRIKANTAIAH, Sheshraj L. TULSHIBAGWALE, Saravjeet SINGH, Alexander TAM