Patents by Inventor Deepesh Rai

Deepesh Rai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Cleaning operations based on deposition thickness
    Patent number: 12686918
    Abstract: A method includes identifying deposition thickness property data associated with an amount of material deposited via one or more substrate processing operations of a process recipe performed in a processing chamber. The method further includes determining, based on the deposition thickness property data and a variable clean time relationship of the process recipe, cleaning operation parameters. The method further includes causing, based on the cleaning operation parameters, a cleaning operation in the processing chamber.
    Type: Grant
    Filed: January 5, 2023
    Date of Patent: July 21, 2026
    Assignee: Applied Materials, Inc.
    Inventors: Victor Zamarian, Mitesh Harshad Sanghvi, Venkatanarayana Shankaramurthy, Yuhyuk Cho, Deepesh Rai
  • CLEANING OPERATIONS BASED ON DEPOSITION THICKNESS
    Publication number: 20240229234
    Abstract: A method includes identifying deposition thickness property data associated with an amount of material deposited via one or more substrate processing operations of a process recipe performed in a processing chamber. The method further includes determining, based on the deposition thickness property data and a variable clean time relationship of the process recipe, cleaning operation parameters. The method further includes causing, based on the cleaning operation parameters, a cleaning operation in the processing chamber.
    Type: Application
    Filed: January 5, 2023
    Publication date: July 11, 2024
    Inventors: Victor Zamarian, Mitesh Harshad Sanghvi, Venkatanarayana Shankaramurthy, Yuhyuk Cho, Deepesh Rai