Abstract: Disclosed are organic electrooptic materials. The electrooptic materials are functionalized by novel methods and structures. The electrooptic materials are structured with a head and a tail where the head and tail sequentially assemble into a non-centrosymmetric ordered array. The electrooptic materials are further structured in covalently bonded dimer pairs where one of the pairs is zwitterionic. The non-centrosymmetric ordered array bonds directly to electrodes which allows for efficient application of the electric field. The organic electrooptic materials disclosed offer greater hyperpolarizability, greater bandwidth, reduced operating voltage with less optical loss.

Abstract: Method for removing deposited material from the interior surfaces of a processing chamber. The method comprises introducing a gas mixture comprising less than 15 mole % nitrogen trifluoride in a diluent gas into a processing chamber having deposited material on the internal surfaces thereof, establishing a plasma in the processing chamber utilizing a radio frequency power density of greater than 1.4 W/cm2 and forming chemically reactive fluorine-containing species therein, reacting the deposited material with the chemically reactive fluorine-containing species to yield volatile reaction products, and removing the volatile reaction products from the processing chamber.