Patents by Inventor Dengzhi WANG

Dengzhi WANG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240392436
    Abstract: The present application discloses a method for cleaning a process chamber and an application thereof. The method for cleaning a process chamber includes: (a) turning on a remote plasma system, exciting a clean-process gas into plasma, and supplying remote plasma to the process chamber; (b) after operation of the remote plasma system reaches a stable state, turning on a radio-frequency power supply system in the process chamber, re-exciting and enhancing the remote plasma positioned in the process chamber by the radio-frequency power supply system, and using both the remote plasma system and the radio-frequency power supply system for jointly acting and cleaning the process chamber during a period of cleaning time; (c) when the cleaning of the process chamber is completed, firstly turning off the radio-frequency power supply system in the process chamber; and (d) then turning off the remote plasma system.
    Type: Application
    Filed: August 5, 2024
    Publication date: November 28, 2024
    Applicants: Suzhou Maxwell Technologies Co., Ltd., Suzhou Maizheng Technology Co., Ltd.
    Inventors: QINGYUAN QU, XUEYONG HE, JIAN ZHOU, ERCHENG WEN, XIANFEI FANG, DENGZHI WANG
  • Publication number: 20240321554
    Abstract: The present disclosure provides a structure and a method for solving parasitic plasma in a plasma processing apparatus, which belong to the field of plasma processing apparatus. In the structure, a first gas channel is in communication with a narrow-bore insulating tube and a second gas channel. The narrow-bore insulating tube is configured to feed a process gas into a gas distribution assembly. An on-off valve is disposed between the second gas channel and the first gas channel. The second gas channel is configured to feed a cleaning gas into the gas distribution assembly. Therefore, on the one hand, the on-off valve can be closed before the processing, and a cleaning gas with a preset pressure can be fed into the wide-bore insulating tube and the second gas channel, thereby forming a relatively high-pressure environment in the wide-bore insulating tube and the second gas channel.
    Type: Application
    Filed: April 21, 2022
    Publication date: September 26, 2024
    Inventors: Dengzhi WANG, Fengming WANG, Chen CHEN, Qingyuan QU, Xueyong HE, Wangjun LI
  • Publication number: 20230307568
    Abstract: Provided are a heterojunction solar cell film deposition apparatus, method and system, a solar cell, a module, and a power generation system. The heterojunction solar cell film deposition apparatus is configured for amorphous silicon-based film deposition, and comprises a loading cavity, a preheating cavity, intrinsic process cavities, doping process cavities and an unloading cavity that are linearly arranged in sequence, the cavities being isolated from each other by means of an isolating valve. At least two intrinsic process cavities are provided and are configured for deposition by means of an intrinsic layer silicon film process; and at least one doping process cavity is provided and is configured for deposition by means of an N-type silicon film or P-type silicon film process. The preheating cavity comprises a heating preheating chamber and a preheating buffer chamber that is configured for adjusting the gas and pressure atmosphere.
    Type: Application
    Filed: April 12, 2021
    Publication date: September 28, 2023
    Inventors: Jian ZHOU, Xinmin CAO, Chen CHEN, Dengzhi WANG, Chao WANG
  • Patent number: 10808364
    Abstract: An onsite steel rail laser processing engineering vehicle, including a laser processing power engineering vehicle and a laser processing cart, the laser processing power engineering vehicle is connected to the laser processing cart; the onsite steel rail laser processing engineering vehicle further comprises a transport mechanism disposed on the laser processing power engineering vehicle; through movement and rotation, the transport mechanism transports the laser processing cart into the laser processing power engineering vehicle or transports the laser processing cart out from the laser processing power engineering vehicle and places it on rails.
    Type: Grant
    Filed: January 24, 2018
    Date of Patent: October 20, 2020
    Assignees: WUHAN NRD LASER ENGINEERING CO., LTD., HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY
    Inventors: Xiaoyan Zeng, Qianwu Hu, Pinghua Guo, Xiaoming Xu, Ming Jiang, Dengzhi Wang, Chongyang Li, Li Meng
  • Publication number: 20200199698
    Abstract: The disclosure discloses a method for reinforcing a rail by laser and auxiliary heat source efficient hybrid cladding. The laser and the auxiliary heat source simultaneously apply on a region to be cladded of a rail surface. The laser serves as a main heat source to enable simultaneous and rapid fusion of an added metal powder and partial substrate material in the rail surface to form a molten pool. The auxiliary heat source moves with the laser heat source in the same direction at the same speed, and performs synchronous preheating and/or post-heating on the laser molten pool, the heat-affected zone and the surface layer of the rail substrate to reduce the temperature gradient, thereby reducing the cooling rate, and avoiding martensite transformation and cracking in the heat-affected zone.
    Type: Application
    Filed: January 18, 2019
    Publication date: June 25, 2020
    Applicants: Wuhan Hivalue Intelaser Ltd., Huazhong University of Science and Technology, WUHAN NRD LASER ENGINEERING CO.,LTD
    Inventors: Xiaoyan ZENG, Li MENG, Dengzhi WANG, Qianwu HU, Pinghua Guo, Xiaohua XU, Li NIU
  • Publication number: 20190161918
    Abstract: An onsite steel rail laser processing engineering vehicle, including a laser processing power engineering vehicle and a laser processing cart, the laser processing power engineering vehicle is connected to the laser processing cart; the onsite steel rail laser processing engineering vehicle further comprises a transport mechanism disposed on the laser processing power engineering vehicle; through movement and rotation, the transport mechanism transports the laser processing cart into the laser processing power engineering vehicle or transports the laser processing cart out from the laser processing power engineering vehicle and places it on rails.
    Type: Application
    Filed: January 24, 2018
    Publication date: May 30, 2019
    Inventors: Xiaoyan ZENG, Qianwu HU, Pinghua GUO, Xiaoming XU, Ming JIANG, Dengzhi WANG, Chongyang LI, Li MENG