Patents by Inventor Denis Aleksandrovich GLUSHKOV
Denis Aleksandrovich GLUSHKOV has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20220132647Abstract: A laser produced plasma light source comprises a vacuum chamber with a rotating target assembly supplying a target into an interaction zone with focused laser beam. The target is layer of a fluid and/or free-flowing target material on a surface of annular groove in the rotating target assembly. An output beam of short-wavelength radiation exits the interaction zone to an optical collector through the means for debris mitigation. A linear velocity of the target is not less than 100 m/s and a vector of the linear velocity of the target in the interaction zone is directed on one side of a plane passing through the interaction zone and the rotation axis while the focused laser beam and the output beam are located on another side of said plane. The optical collector comprises two ellipsoidal mirror units arranged in a tandem.Type: ApplicationFiled: January 6, 2022Publication date: April 28, 2022Inventors: Samir ELLWI, Denis Aleksandrovich GLUSHKOV, Vladimir Vitalievich IVANOV, Oleg Borisovich KHRISTOFOROV, Konstantin Nikolaevich KOSHELEV, Mikhail Sergeyevich KRIVOKORYTOV, Vladimir Mikhailovich KRIVTSUN, Aleksandr Andreevich LASH, Vyacheslav Valerievich MEDVEDEV, Aleksandr Yurievich VINOKHODOV
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Patent number: 11252810Abstract: A radiation source contains a collector module comprising an optical collector, positioned in a vacuum chamber with an emitting plasma, further comprising a means for debris mitigation which include at least two casings arranged to output debris-free homocentric beams of the short-wavelength radiation, coming to the optical collector preferably consisting of several identical mirrors. Outside each casing there are permanent magnets that create a magnetic field inside the casings to mitigate charged fraction of debris particles and provide the debris-free homocentric beams of short-wavelength radiation. Other debris mitigating techniques are additionally used. Preferably the plasma is laser-produced plasma of a liquid metal target supplied by a rotating target assembly to a focus area of a laser beam. The technical result of the invention is the creation of high-powerful high-brightness debris-free sources of short-wavelength radiation with large, preferably more than 0.25 sr, collection solid angle.Type: GrantFiled: November 19, 2020Date of Patent: February 15, 2022Assignees: Isteq B.V., RnD-ISAN. LtdInventors: Vladimir Vitalievich Ivanov, Aleksandr Yurievich Vinokhodov, Konstantin Nikolaevich Koshelev, Mikhail Sergeyevich Krivokorytov, Vladimir Mikhailovich Krivtsun, Aleksandr Andreevich Lash, Vyacheslav Valerievich Medvedev, Yury Viktorovich Sidelnikov, Oleg Feliksovich Yakushev, Oleg Borisovich Khristoforov, Denis Aleksandrovich Glushkov, Samir Ellwi
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Publication number: 20210092824Abstract: A radiation source contains a collector module comprising an optical collector, positioned in a vacuum chamber with an emitting plasma, further comprising a means for debris mitigation which include at least two casings arranged to output debris-free homocentric beams of the short-wavelength radiation, coming to the optical collector preferably consisting of several identical mirrors. Outside each casing there are permanent magnets that create a magnetic field inside the casings to mitigate charged fraction of debris particles and provide the debris-free homocentric beams of short-wavelength radiation. Other debris mitigating techniques are additionally used. Preferably the plasma is laser-produced plasma of a liquid metal target supplied by a rotating target assembly to a focus area of a laser beam. The technical result of the invention is the creation of high-powerful high-brightness debris-free sources of short-wavelength radiation with large, preferably more than 0.25 sr, collection solid angle.Type: ApplicationFiled: November 19, 2020Publication date: March 25, 2021Inventors: Vladimir Vitalievich IVANOV, Aleksandr Yurievich VINOKHODOV, Konstantin Nikolaevich KOSHELEV, Mikhail Sergeyevich KRIVOKORYTOV, Vladimir Mikhailovich KRIVTSUN, Aleksandr Andreevich LASH, Vyacheslav Valerievich MEDVEDEV, Yury Viktorovich SIDELNIKOV, Oleg Feliksovich YAKUSHEV, Oleg Borisovich KHRISTOFOROV, Denis Aleksandrovich GLUSHKOV, Samir ELLWI
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Patent number: 10887973Abstract: Laser-produced plasma light source contains a vacuum chamber with a rotating target assembly providing a target in an interaction zone with a laser beam focused on the said target, which is a molten metal layer. A debris shield is rigidly mounted to surround the interaction zone, said shield comprising only two opening forming an entrance for the laser beam and an exit for a short-wavelength radiation beam. The means for debris mitigation can additionally include: the rotation of target with high linear velocity exciding 80 m/s; the orientation of the short-wavelength radiation beam and/or of the laser beam at an angle of less than 45° to the target surface, a nozzle supplying a high-speed gas flow to the interaction zone, etc. The technical result is the creation of the high-brightness low-debris sources of soft X-ray, EUV and VUV light at wavelengths of 0.4 to 200 nm.Type: GrantFiled: January 27, 2020Date of Patent: January 5, 2021Assignees: ISTEQ B.V., RnD-ISAN, LtdInventors: Vladimir Vitalievich Ivanov, Aleksandr Yurievich Vinokhodov, Konstantin Nikolaevich Koshelev, Mikhail Sergeyevich Krivokorytov, Vladimir Mikhailovich Krivtsun, Aleksandr Andreevich Lash, Vyacheslav Valerievich Medvedev, Yury Viktorovich Sidelnikov, Oleg Feliksovich Yakushev, Oleg Borisovich Khristoforov, Denis Aleksandrovich Glushkov, Samir Ellwi
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Publication number: 20200163197Abstract: Laser-produced plasma light source contains a vacuum chamber with a rotating target assembly providing a target in an interaction zone with a laser beam focused on the said target, which is a molten metal layer. A debris shield is rigidly mounted to surround the interaction zone, said shield comprising only two opening forming an entrance for the laser beam and an exit for a short-wavelength radiation beam. The means for debris mitigation can additionally include: the rotation of target with high linear velocity exciding 80 m/s; the orientation of the short-wavelength radiation beam and/or of the laser beam at an angle of less than 45° to the target surface, a nozzle supplying a high-speed gas flow to the interaction zone, etc. The technical result is the creation of the high-brightness low-debris sources of soft X-ray, EUV and VUV light at wavelengths of 0.4 to 200 nm.Type: ApplicationFiled: January 27, 2020Publication date: May 21, 2020Inventors: Vladimir Vitalievich IVANOV, Aleksandr Yurievich VINOKHODOV, Konstantin Nikolaevich KOSHELEV, Mikhail Sergeyevich KRIVOKORYTOV, Vladimir Mikhailovich KRIVTSUN, Aleksandr Andreevich LASH, Vyacheslav Valerievich MEDVEDEV, Yury Viktorovich SIDELNIKOV, Oleg Feliksovich YAKUSHEV, Oleg Borisovich KHRISTOFOROV, Denis Aleksandrovich GLUSHKOV, Samir ELLWI
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Patent number: 10588210Abstract: High-brightness short-wavelength radiation source contains a vacuum chamber with a rotating target assembly having an annular groove, an energy beam focused on the target, a useful short-wavelength radiation beam coming out of the interaction zone, wherein the target is a layer of molten metal formed by a centrifugal force on a surface of the annular groove facing a rotation axis. A replaceable membrane made of carbon nanotubes may be installed on a pathway of the short-wavelength radiation beam for debris mitigation. In the embodiments of the invention the energy beam is a pulsed laser beam. The pulsed laser beam may consist of pre-pulse and main-pulse, with parameters such as laser pulse repetition rate chosen in order to suppress debris. In other embodiments the energy beam is the electron beam produced by an electron gun and the rotating target assembly is a rotating anode.Type: GrantFiled: August 8, 2019Date of Patent: March 10, 2020Assignees: Isteq B.V., RnD-ISAN, LtdInventors: Aleksandr Yurievich Vinokhodov, Vladimir Vitalievich Ivanov, Konstantin Nikolaevich Koshelev, Mikhail Sergeyevich Krivokorytov, Vladimir Mikhailovich Krivtsun, Aleksandr Andreevich Lash, Vyacheslav Valerievich Medvedev, Yury Viktorovich Sidelnikov, Oleg Feliksovich Yakushev, Oleg Borisovich Khristoforov, Denis Aleksandrovich Glushkov, Samir Ellwi
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Publication number: 20200060014Abstract: High-brightness short-wavelength radiation source contains a vacuum chamber with a rotating target assembly having an annular groove, an energy beam focused on the target, a useful short-wavelength radiation beam coming out of the interaction zone, wherein the target is a layer of molten metal formed by a centrifugal force on a surface of the annular groove facing a rotation axis. A replaceable membrane made of carbon nanotubes may be installed on a pathway of the short-wavelength radiation beam for debris mitigation. In the embodiments of the invention the energy beam is a pulsed laser beam. The pulsed laser beam may consist of pre-pulse and main-pulse, with parameters such as laser pulse repetition rate chosen in order to suppress debris. In other embodiments the energy beam is the electron beam produced by an electron gun and the rotating target assembly is a rotating anode.Type: ApplicationFiled: August 8, 2019Publication date: February 20, 2020Inventors: Aleksandr Yurievich VINOKHODOV, Vladimir Vitalievich IVANOV, Konstantin Nikolaevich KOSHELEV, Mikhail Sergeyevich KRYVOKORYTOV, Vladimir Mikhailovich KRIVTSUN, Aleksandr Andreevich LASH, Vyacheslav Valerievich MEDVEDEV, Yury Viktorovich SIDELNIKOV, Oleg Feliksovich YAKUSHEV, Oleg Borisovich KHRISTOFOROV, Denis Aleksandrovich GLUSHKOV, Samir ELLWI