Patents by Inventor Denis Griot

Denis Griot has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Thermal annealing of semiconductor devices
    Patent number: 5284795
    Abstract: A method of processing a semiconductor device in which a microwave field is generated to surround the semiconductor device while a focussed electron beam or ion beam is applied to the substrate of the device whereby the presence of the electron or ion beam creates a conductive region which increases the microwave field intensity in that region, so that the intensified microwave field creates a local heating effect in the substrate to perform a local annealing action.
    Type: Grant
    Filed: December 9, 1991
    Date of Patent: February 8, 1994
    Assignee: Motorola, Inc.
    Inventors: Henri Gay, Denis Griot, Irenee Pages